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TiO₂/multi-wall carbon nanotube (MWNT) heterojunction arrays were synthesized and immobilized on Si(001) substrate as photocatalysts for inactivation of Escherichia coli bacteria. The vertically aligned MWNT arrays were grown on ∼5nm Ni thin film deposited on the Si by using plasma enhanced chemical vapor deposition at 650°C. Then, the MWNTs were coated by TiO₂ using dip-coating sol–gel method. Post annealing of the TiO₂/MWNTs at 400°C resulted in crystallization of the TiO₂ coating and formation of Ti–C and Ti–O–C carbonaceous bonds at the heterojunction. The visible light-induced photoinactivation of the bacteria increased from MWNTs to TiO₂ to TiO₂/MWNTs, in which the bacteria could even slightly breed on the MWNTs. In addition, the TiO₂/MWNTs annealed at 400°C showed a highly improved antibacterial activity than the TiO₂/MWNTs annealed at 100°C. The excellent visible light-induced …