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A multifunctional sensor comprising humidity, temperature, and flow detection capabilities is fabricated with a facile, single-layered device structure. A microheater based on serpentine Pt microlines plays key roles in both humidity and flow sensing at the hot state by introducing an efficient Joule heating effect, and meanwhile functions as a reliable thermistor at the cold state for accurate temperature measurement. For the first time, the strong temperature-dependent humidity-sensing properties of graphene oxide (GO) are revealed using the microheater platform. The GO-based humidity sensor displays ultrahigh sensitivity [124/% relative humidity (RH)], fast response time (3 s), wide detection range (8–95% RH) at room temperature, while the sensitivity drops at elevated temperatures, indicating the non-negligible temperature effect. Interestingly, a linear relationship between sensitivity and voltage is observed for the …