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Microelectromechanical system (MEMS) thermopile infrared (IR) detectors excel in contactless, highly sensitive, noninvasive temperature measurements over a wide range, without cooling systems, making them ideal for precise intelligent sensing applications. In this study, we present a micromachined thermopile IR detector utilizing a radially distributed dual-layer thermopile that demonstrates fast response time and significantly improved responsivity and detectivity. A dual-layer thermocouple array is designed by applying the N-/P-poly, which is radially distributed on a SiO2 supporting layer and suspended by dry etching the backside of a silicon substrate. The results of the study, which compared traditional four-ended beam structures with radially distributed structures that were modeled and simulated, indicate that the latter design enhances the output voltage and significantly improves responsivity and detectivity, with an …