作者
Haoqing Zhang, Jan Pekárek, Jianguo Feng, Xiaocheng Liu, Huanan Li, Hanliang Zhu, Vojtěch Svatoš, Imrich Gablech, Pavel Podešva, Sheng Ni, Levent Yobas, Pavel Neužil
发表日期
2020/11/1
期刊
Journal of Vacuum Science & Technology B
卷号
38
期号
6
出版商
AIP Publishing
简介
Microfluidic devices typically require complex shapes such as funnels, spirals, splitters, channels with different widths, or customized objects of arbitrary complexity with a smooth transition between these elements. Device layouts are generally designed by software developed for the design of integrated circuits or by general computer-aided design drawing tools. Both methods have their limitations, making these tasks time consuming. Here, a script-based, time-effective method to generate the layout of various microfluidic chips with complex geometries is presented. The present work uses the nanolithography toolbox (NT), a platform-independent software package, which employs parameterized fundamental blocks (cells) to create microscale and nanoscale structures. In order to demonstrate the functionality and efficiency of the NT, a few classical microfluidic devices were designed using the NT and then …
引用总数
20212022202320242313
学术搜索中的文章
H Zhang, J Pekárek, J Feng, X Liu, H Li, H Zhu… - Journal of Vacuum Science & Technology B, 2020