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The stability of structures microfabricated in soft elastomeric polymers is an important concern in most applications that use these structures. Although relevant for several applications, the collapse to the ground of high aspect ratio structures (ground collapse) is still poorly understood. The stability of soft microfabricated high aspect ratio structures versus ground collapse was experimentally assessed, and a new model of ground collapse involving adhesion was developed. Sets of posts with diameters from 0.36 to 2.29 μm were fabricated in poly(dimethylsiloxane) and tested in air or immersed in water and ethanol to change the work of adhesion. The critical aspect ratio (the highest length-to-width ratio for which a post is not at risk of collapsing) was determined as a function of the diameter. The critical aspect ratio in air ranged from 2 to 4 and increased with the diameter. Work of adhesion was found to be determinant …