作者
MF Malek, MH Mamat, Z Khusaimi, MZ Sahdan, MZ Musa, AR Zainun, AB Suriani, ND Md Sin, SB Abd Hamid, M Rusop
发表日期
2014/1/5
期刊
Journal of Alloys and Compounds
卷号
582
页码范围
12-21
出版商
Elsevier
简介
Zinc oxide (ZnO) thin films have been deposited onto glass substrates at various deposition speeds by a sonicated sol–gel dip-coating technique. This work studies the effects of deposition speed on the crystallisation behaviour and optical and electrical properties of the resulting films. X-ray diffraction (XRD) analysis showed that thin films were preferentially oriented along the (0 0 2) c-axis direction of the crystal. The transformation sequence of strain and stress effects in ZnO thin films has also been studied. The films deposited at a low deposition speed exhibited a large compressive stress of 0.78 GPa, which decreased to 0.43 GPa as the deposition speed increased to 40 mm/min. Interestingly, the enhancement in the crystallinity of these films led to a significant reduction in compressive stress. All films exhibited an average transmittance of greater than 90% in the visible region, with absorption edges at ∼380 nm …
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