作者
SS Kushvaha, M Senthil Kumar, BS Yadav, Pawan K Tyagi, Sunil Ojha, KK Maurya, BP Singh
发表日期
2016
期刊
CrystEngComm
卷号
18
期号
5
页码范围
744-753
出版商
Royal Society of Chemistry
简介
High-quality GaN layers were grown on sapphire (0001) substrates using laser molecular beam epitaxy (LMBE) by laser ablating a solid GaN target at different laser repetition rates (10–40 Hz) under a constant supply of r.f. nitrogen plasma. The effect of laser repetition rate on the structural and optical properties of GaN layers was systematically studied using high-resolution X-ray diffraction (HRXRD), field emission scanning electron microscopy, atomic force microscopy, Raman spectroscopy and photoluminescence (PL) spectroscopy. High-resolution X-ray rocking curve measurements revealed highly c-axis oriented GaN layers on sapphire grown at 30 Hz with a calculated screw dislocation density of ~1.42 × 107 cm−2, whereas the GaN layers grown at 10 or 40 Hz consisted the screw dislocation density in the range of 108–109 cm−2. Surface morphological analysis revealed a change in grain size as well as …
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