作者
XingXing Fu, Bei Zhang, XiangNing Kang, JunJing Deng, Chang Xiong, Tao Dai, XianZhe Jiang, TongJun Yu, ZhiZhong Chen, Guo Yi Zhang
发表日期
2011/9/12
期刊
Optics Express
卷号
19
期号
105
页码范围
A1104-A1108
出版商
Optica Publishing Group
简介
In this paper, we propose and demonstrate a convenient and flexible approach for preparation large-area of photonic crystals (PhCs) structures on the GaN-based LED chip. The highly-ordered porous anodic alumina (AAO) with pitch of wavelength scale was adopted as a selective dry etching mask for PhCs-pattern transfer. The PhCs with different pore depths were simultaneously formed on the entire surfaces of GaN-based LED chip including ITO, GaN surrounding contacts and the sidewall of the mesa by one-step reactive ion etching (RIE). The light output power improvement of PhCs-based GaN LED was achieved as high as 94% compared to that of the conventional GaN-based LED.
引用总数
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