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This paper presents the capacitive differential pressure sensor (CDPS) structure modeling, diaphragm material selection for CDPS and the analysis on deflection and capacitive sensitivity. Principle of CDPS was explained for the proposed model, whereas earlier works reports on absolute pressure sensing techniques. Simple and sandwich diaphragm structure for the CDPS was also proposed and its deflection characteristics was analyzed. Five different CDPS structure was modeled ranging from simple to complex structure. Simulation was carried out for the differential pressure range from −56 mbar to 900 mbar, used to study centre deflection sensitivity and capacitive sensitivity for the proposed CDPS structure models for altimeter application. From the simulation results it was observed, that model 3-high sensitive CDPS structure with polyimide sandwich diaphragm structure meets the desired …