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Artificial multilayer neutron supermirrors are composed of discrete sets of bilayer structures based on Ni and Ti layers with graded thicknesses and with high scattering contrast between individual layers. Various samples consisting of NiX x TiY y (X= C, N, dry air, Y= H, V) periodic multilayers and supermirrors, as well as NiX x and TiY y monolayers were deposited on normal float-glass, borkron glass and on silicon substrates using dc magnetron sputtering. The structure and stability of these thin films is the object of a detailed study mainly by means of X-ray diffraction, TEM, AFM and neutron reflectometry. The addition of N to the Ni layers yields a Ni lattice dilatation, a reorientation of the Ni grains from {111} to {200} parallel to the layer surface, a reduction of the grain size, a smoothing of the layer surfaces (R rms∼ 0.3 nm for d= 10 nm), a sharpening of the multilayer interfaces and an enhancement of the scattering …