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Pure and rare earth elements of samarium (Sm), lanthanum (La) and neodymium (Nd) doped cadmium oxide (CdO) thin films were deposited on glass substrates by radiofrequency magnetron sputtering at room temperature. The influence of rare earth dopants on the microstructural, morphological and optoelectronic properties of the CdO thin films were studied elaborately. The X-ray diffraction studies revealed the polycrystalline with face centered cubic structure of CdO thin films. The structural defects were increased with increase of dopant’s ionic radii. The presence of the dopants in host CdO thin films was confirmed by X-ray photoelectron spectroscopic analysis. The roughness of the films was decreased for the doped samples and Nd doped CdO thin film has the minimum roughness value of 1.29 nm. All the films exhibited high transmittance in visible range and well pronounced Moss-Burstein shift was …