作者
Dustin A Richmond, Qifeng Zhang, Guozhong Cao, Dirk N Weiss
发表日期
2011/3/1
期刊
Journal of Vacuum Science & Technology B
卷号
29
期号
2
出版商
AIP Publishing
简介
A soft-imprint method for obtaining anatase TiO 2 nanostructures is reported. The method is de facto pressureless and is performed without the need for dedicated imprint equipment. A titanium butoxide-based sol precursor is prepared with a heavy alcohol, methoxy ethanol, as a solvent. The use of an incompletely cross-linked very soft polydimethylsiloxane mold is found to be crucial for obtaining large-area high-quality imprints. The authors discuss quantitatively the observed substrate-constrained shrinkage of pillars and lines (ridges) during annealing.
学术搜索中的文章
DA Richmond, Q Zhang, G Cao, DN Weiss - Journal of Vacuum Science & Technology B, 2011