作者
Pavel Aseev, Guanzhong Wang, Luca Binci, Amrita Singh, Sara Martí-Sánchez, Marc Botifoll, Lieuwe J Stek, Alberto Bordin, John D Watson, Frenk Boekhout, Daniel Abel, John Gamble, Kevin Van Hoogdalem, Jordi Arbiol, Leo P Kouwenhoven, Gijs De Lange, Philippe Caroff
发表日期
2019/11/15
期刊
Nano letters
卷号
19
期号
12
页码范围
9102-9111
出版商
American Chemical Society
简介
Selective area growth is a promising technique to realize semiconductor–superconductor hybrid nanowire networks, potentially hosting topologically protected Majorana-based qubits. In some cases, however, such as the molecular beam epitaxy of InSb on InP or GaAs substrates, nucleation and selective growth conditions do not necessarily overlap. To overcome this challenge, we propose a metal-sown selective area growth (MS SAG) technique, which allows decoupling selective deposition and nucleation growth conditions by temporarily isolating these stages. It consists of three steps: (i) selective deposition of In droplets only inside the mask openings at relatively high temperatures favoring selectivity, (ii) nucleation of InSb under Sb flux from In droplets, which act as a reservoir of group III adatoms, done at relatively low temperatures, favoring nucleation of InSb, and (iii) homoepitaxy of InSb on top of the formed …
引用总数
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