查看文章

The structural, optical, and photoluminescence properties of porous silicon (PSi)/titanium dioxide (TiO₂) nanostructures were investigated. PSi structures consisting of macro- and mesoporous layers were fabricated by metal-assisted chemical etching, and then TiO₂ was introduced inside the PSi matrix using the atomic layer deposition technique. We performed scanning electron microscopy, transmission electron microscopy (TEM), X-ray diffraction, energy dispersive X-ray spectroscopy, Raman spectroscopy, ellipsometry, and photoluminescence (PL) spectroscopy to characterize the prepared and annealed PSi/TiO₂ nanostructures. TEM and Raman analyses revealed that TiO₂ had a crystalline anatase structure. PL measurements of the PSi/TiO₂ composite system showed two broad peaks at approximately 2.4–3 eV (blue PL) and 1.7–1.9 eV (red PL). The mechanisms of the emissions were discussed, and it was …