作者
W Guo, ZB Wang, Lin Li, DJ Whitehead, BS Luk’Yanchuk, Z Liu
发表日期
2007/6/11
期刊
Applied Physics Letters
卷号
90
期号
24
出版商
AIP Publishing
简介
The authors present a simple and efficient technique for laser writing of arbitrary nanopatterns across a large surface area without using projection masks. It is based on the unique near-field focusing effect of a self-assembled particle array on the surface interacting with an angular incident laser beam. The spot resolution can be down to 80 nm. More than 6× 10 6 nanolines and c-shaped uniform patterns were fabricated simultaneously over an area of 5× 5 mm 2 by a few laser shots.
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W Guo, ZB Wang, L Li, DJ Whitehead, BS Luk'Yanchuk… - Applied Physics Letters, 2007