作者
A Bute, S Jena, S Kedia, DV Udupa, K Singh, D Bhattacharya, MH Modi, N Chand, S Sinha
发表日期
2021/1/15
期刊
Materials Chemistry and Physics
卷号
258
页码范围
123860
出版商
Elsevier
简介
Radio-Frequency Plasma Enhanced Chemical Vapour Deposition (RF-PECVD), and Pulsed Laser Deposition (PLD) techniques were used to deposit boron carbide (BxC) thin films. Films were investigated to compare crystallinity, chemical composition, optical properties, and residual stress. X-ray diffraction analysis revealed that the film deposited by PLD was amorphous, while PECVD technique yielded crystalline BxC film. PLD technique provided films with better stoichiometric purity with B4C being the most dominant phase, as observed in XPS spectra. However, super-stoichiometric phase (BxC (x > 4)) was dominant in PECVD film. Moreover, the PECVD film had greater adhesion (Lc3 ~29.5 N), hardness (~2798 HK), and lubricity (COF~ 0.03) compared to PLD deposited film. Optically, PECVD deposited film have higher value of refractive indices (1.82 at 600 nm) and lower extinction coefficient. Finally, residual …
引用总数
20212022202320245652