作者
Yifeng Chen, Daming Chen, Chengfa Liu, Zigang Wang, Yang Zou, Yu He, Yao Wang, Ling Yuan, Jian Gong, Wenjie Lin, Xueling Zhang, Yang Yang, Hui Shen, Zhiqiang Feng, Pietro P Altermatt, Pierre J Verlinden
发表日期
2019/10
期刊
Progress in Photovoltaics: Research and Applications
卷号
27
期号
10
页码范围
827-834
简介
We present an industrial tunnel oxide passivated contacts (i‐TOPCon) bifacial crystalline silicon (c‐Si) solar cell based on large‐area n‐type substrate. The interfacial thin SiO2 is thermally growth and in situ capped by an intrinsic poly‐Si layer deposited by low‐pressure chemical vapor deposition (LPCVD). The intrinsic poly‐Si layer is doped in an industrial POCl3 diffusion furnace to form the n+ poly‐Si at the rear, which shows an excellent surface passivation characteristics with J0 = 2.6 fA/cm2 when passivated by a SiNx:H layer deposited by plasma‐enhanced chemical vapor deposition (PECVD). With an industrial fabrication process, the cells are manufactured with screen‐printed front and rear metallization, using large‐area 6‐in. n‐type Czochralski (Cz) Si wafers. We demonstrate an average front‐side efficiency greater than 23% and an open‐circuit voltage Voc greater than 700 mV. These results are based …
引用总数
20192020202120222023202473641534012
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