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A Comprehensive Digital Twin Framework for Semiconductor Manufacturing: Case Study - Optimized Scheduling/Dispatch

作者

Yassine Qamsane, James Moyne, Dawn Tilbury, Kira Barton

发表日期

2019/10

研讨会论文

The 31st Advanced Process Control Conference, http://apcconference.com

引用总数

被引用次数：2

202020211 1

学术搜索中的文章

A comprehensive digital twin framework for semiconductor manufacturing: Case study—Optimized scheduling/dispatch

Y Qamsane, J Moyne, D Tilbury, K Barton - Proc. Adv. Process Control Conf. XXXI, 2019

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