作者
Simone Tanzi, Peter Friis Østergaard, Marco Matteucci, Thomas Lehrmann Christiansen, Jiri Cech, Rodolphe Marie, Rafael Taboryski
发表日期
2012/9/25
期刊
Journal of Micromechanics and Microengineering
卷号
22
期号
11
页码范围
115008
出版商
IOP Publishing
简介
Microfabricated single-cell capture and DNA stretching devices have been produced by injection molding. The fabrication scheme employed deep reactive ion etching in a silicon substrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposes technical solutions to fabrication challenges associated with chip sealing and demolding of polymer high-volume replication methods. UV-assisted thermal bonding was found to ensure a strong seal of the microstructures in the molded part without altering the geometry of the channels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting two larger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the other device single-HeLa cells were captured against a micro-aperture connecting two larger microfluidic channels. Different dry etching processes have been investigated for the master origination of the …
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