作者
Louise S Price, Ivan P Parkin, Amanda ME Hardy, Robin JH Clark, Thomas G Hibbert, Kieran C Molloy
发表日期
1999/7/19
期刊
Chemistry of materials
卷号
11
期号
7
页码范围
1792-1799
出版商
American Chemical Society
简介
Atmospheric pressure chemical vapor deposition of SnS2, Sn2S3, and SnS has been achieved onto glass substrates from the reaction of SnCl4 with H2S at 300−545 °C. The films show good uniformity and surface coverage, adherence, and a variety of colors (black, yellow, brown, and gray) dependent on deposition temperature and film thickness. Growth rates were on the order of 1−2 μm min-1. All the films were crystalline. For substrate temperatures of up to 500 °C single phase films with the hexagonal SnS2 structure (a = 3.65(1) Å, c = 5.88(1) Å) were formed. At 525 °C a film of mixed composition containing predominantly orthorhombic Sn2S3 (a = 8.83(1) Å, b = 3.76(1) Å, c = 14.03(1) Å) was formed together with some SnS2. At 545 °C films with orthorhombic SnS structure (a = 4.30(1) Å, b = 11.20(1) Å, c = 3.99(1) Å) were formed. Scanning electron microscopy (SEM) revealed a variety of different film …
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