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Compared to electrical double-layer capacitors (EDLCs) using carbon-based electrodes, recent studies have shown greater electrical energy storage capacity associated with electrodes of transition metal oxides and nitrides. This new generation of super capacitors exhibits mixed double-layer and pseudo-capacitive properties. The possibility of using Solution Precursor Plasma Spray (SPPS) to fabricate super-capacitor electrodes from transition metal oxides/nitrides is under investigation in the current study.

SPPS uses precursor solutions as the feedstock injected into the DC-arc plasma instead of the powder used in conventional thermal spray processes to deposit coatings of fine grain size and high surface area. Large specific surface area is a determinant factor for the large electrical energy storage capability of super-capacitors. A wide range of lath-like MoO3 structures has been observed, varying in size, alignment and configuration. Various spray operating parameters affecting the thermal history of the precursor solution droplets, including the number of spray passes and standoff distances, were investigated. The results of x-ray diffraction phase analyses and scanning electron microscopy observations will be discussed and related to the deposition parameters.