作者
Oliver Fenwick, Laurent Bozec, Dan Credgington, Azzedine Hammiche, Giovanni Mattia Lazzerini, Yaron R Silberberg, Franco Cacialli
发表日期
2009/10
期刊
Nature nanotechnology
卷号
4
期号
10
页码范围
664-668
出版商
Nature Publishing Group UK
简介
Patterning of semiconducting polymers on surfaces is important for various applications in nanoelectronics and nanophotonics. However, many of the approaches to nanolithography that are used to pattern inorganic materials are too harsh for organic semiconductors, so research has focused on optical patterning,, and various soft lithographies. Surprisingly little attention has been paid to thermal, thermomechanical, and thermochemical,,,,, patterning. Here, we demonstrate thermochemical nanopatterning of poly(p-phenylene vinylene), a widely used electroluminescent polymer, by a scanning probe. We produce patterned structures with dimensions below 28 nm, although the tip of the probe has a diameter of 5 µm, and achieve write speeds of 100 µm s−1. Experiments show that a resolution of 28 nm is possible when the tip–sample contact region has dimensions of ∼100 nm and, on the basis of finite-element …
引用总数
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学术搜索中的文章
O Fenwick, L Bozec, D Credgington, A Hammiche… - Nature nanotechnology, 2009