| Ruthenium-assisted chemical etching of silicon: Enabling CMOS-compatible 3D semiconductor device nanofabrication A Mallavarapu, P Ajay, C Barrera, SV Sreenivasan ACS Applied Materials & Interfaces 13 (1), 1169-1177, 2020 | 32 | 2020 |
| Enabling ultrahigh-aspect-ratio silicon nanowires using precise experiments for detecting the onset of collapse A Mallavarapu, P Ajay, SV Sreenivasan Nano Letters 20 (11), 7896-7905, 2020 | 27 | 2020 |
| Fabricating large area multi-tier nanostructures SV Sreenivasan, P Joseph, O Abed, M Grigas, A Mallavarapu, P Ajay US Patent 9,941,389, 2018 | 25 | 2018 |
| Multifield sub-5 nm overlay in imprint lithography P Ajay, A Cherala, BA Yin, EE Moon, R Fabian Pease, SV Sreenivasan Journal of Vacuum Science & Technology B 34 (6), 2016 | 12 | 2016 |
| Simultaneous Micro-and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch RM Lema Galindo, P Ajay, SV Sreenivasan Journal of Micro-and Nano-Manufacturing 10 (3), 031001, 2022 | 5 | 2022 |
| Metal Assisted Chemical Etch of Polycrystalline Silicon C Barrera, P Ajay, A Mallavarapu, M Hrdy, SV Sreenivasan Journal of Micro-and Nano-Manufacturing 10 (2), 021002, 2022 | 4 | 2022 |
| Large area metrology and process control for anisotropic chemical etching SV Sreenivasan, A Mallavarapu, JG Ekerdt, MA Grigas, Z Ghaznavi, ... US Patent App. 17/433,777, 2022 | 4 | 2022 |
| Nano-Precision Systems for Overlay in Advanced Lithography Processes P Ajay, SV Sreenivasan Proceedings of the 4th International Conference on the Industry 4.0 Model …, 2019 | 4 | 2019 |
| Nanofabrication and design techniques for 3D ICs and configurable ASICs SV Sreenivasan, P Ajay, A Sayal, M Mcdermott, J Kulkarni US Patent 12,079,557, 2024 | 3 | 2024 |
| M2A2: Microscale Modular Assembled ASICs for High-Mix, Low-Volume, Heterogeneously Integrated Designs A Sayal, P Ajay, MW McDermott, SV Sreenivasan, JP Kulkarni IEEE Transactions on Computer-Aided Design of Integrated Circuits and …, 2020 | 3 | 2020 |
| Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques M Hrdy, A Mallavarapu, M Castañeda, P Ajay, SV Sreenivasan Journal of Micro and Nano-Manufacturing 11 (1), 2023 | 2 | 2023 |
| Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place SV Sreenivasan, P Ajay, A Sayal, M Mcdermott, S Singhal, O Abed, ... US Patent 12,009,247, 2024 | 1 | 2024 |
| Processes and applications for catalyst influenced chemical etching SV Sreenivasan, P Ajay, A Mallavarapu, C Barrera US Patent App. 18/132,324, 2023 | 1 | 2023 |
| Roll-to-roll programmable film imprint lithography SV Sreenivasan, S Singhal, O Abed, L Dunn, P Ajay, O Ezekoye US Patent 11,669,009, 2023 | 1 | 2023 |
| Processes and applications for catalyst influenced chemical etching SV Sreenivasan, P Ajay, A Mallavarapu, C Barrera US Patent App. 18/090,471, 2023 | 1 | 2023 |
| Nanofabrication and design techniques for 3d ics and configurable asics SV Sreenivasan, P Ajay, A Sayal, M Mcdermott, J Kulkarni US Patent App. 18/081,165, 2023 | 1 | 2023 |
| Nanoscale-aligned three-dimensional stacked integrated circuit SV Sreenivasan, P Ajay, A Sayal, O Abed, M Mcdermott, J Kulkarni, ... US Patent 11,600,525, 2023 | 1 | 2023 |
| Effect of initial conditions on uniformity of metal assisted chemical etch for ultra-high aspect ratio, taper-free silicon nanostructures A Mallavarapu, M Hrdy, M Castaneda, P Ajay, SV Sreenivasan Advanced Etch Technology and Process Integration for Nanopatterning XI …, 2022 | 1 | 2022 |
| Multi-field overlay control in jet and flash imprint lithography SV Sreenivasan, P Ajay, A Cherala US Patent 10,191,368, 2019 | 1 | 2019 |
| Reduction of backside particle induced out-of-plane distortions in semiconductor wafers SV Sreenivasan, A Westfahl, P Ajay US Patent App. 15/134,179, 2016 | 1 | 2016 |
S.V. SreenivasanUniversity of Texas at Austin在 mail.utexas.edu 的电子邮件经过验证
