| Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz H Zhang, Y Xing, Y Li, MA Gosálvez, X Qiu Sensors and Actuators A: Physical 256, 24-34, 2017 | 18 | 2017 |
| Simulation of microloading and ARDE in DRIE MA Gosalvez, Y Zhou, Y Zhang, G Zhang, Y Li, Y Xing 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 18 | 2015 |
| Transient and stable profiles during anisotropic wet etching of quartz Y Xing, MA Gosalvez, H Zhang, Y Li, X Qiu Journal of Microelectromechanical Systems 26 (5), 1063-1072, 2017 | 14 | 2017 |
| Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching Y Li, MA Gosálvez, P Pal, K Sato, Y Xing Journal of Micromechanics and Microengineering 25 (5), 055023, 2015 | 12 | 2015 |
| Fluctuations During Anisotropic Etching: Local Recalibration and Application to Si {110} MA Gosálvez, Y Li, N Ferrando, P Pal, K Sato, Y Xing Journal of Microelectromechanical Systems, 2016 | 9 | 2016 |
| Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton Y Li, Y Xing, MA Gosalvez, P Pal, Y Zhou Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS …, 2013 | 7 | 2013 |
| An experiment-based method for focused ion beam milling profile calculation and process design Y Li, Y Xing, C Fang, Q Chen, X Qiu Sensors and Actuators A: Physical 286, 78-90, 2019 | 6 | 2019 |
| The study of self-limited state profile and level set simulation of anisotropic wet etching on quartz Y Xing, H Zhang, PP Cai, Y Li 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 4 | 2017 |
| The application of level set method for simulation of PECVD/LPCVD processes SS Singh, Y Li, Y Xing, P Pal Proceedings of the Physics of Semiconductor Devices: 17th International …, 2013 | 4 | 2013 |
| Evolutionary kinetic monte carlo method for the simulation of anisotropic etching of z-cut, at-cut and bt-cut quartz H Zhang, Y Xing, J Zhang, MA Gosálvez, Y Li, Y Zhang 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 3 | 2017 |
| An experiment-based model for focused ion beam simulation and the process design optimization Y Li, Y Xing, H Zhang, X Qiu 2018 IEEE Micro Electro Mechanical Systems (MEMS), 487-490, 2018 | | 2018 |
| Modeling and Simulation of Thin Film Deposition on 3-Dimensional MEMS Structures PP Sajal Sagar Singh, Xing Yan, Li Yuan International Conference on Advance Trends in Engineering, Technology and …, 2014 | | 2014 |
Dr. Prem PalProfessor, Dept. of Physics, IIT Hyderabad, India在 iith.ac.in 的电子邮件经过验证
Dr. Prem PalProfessor, Dept. of Physics, IIT Hyderabad, India在 iith.ac.in 的电子邮件经过验证