MEMS Physical Sensors S Beeby, G Ensell, M Kraft, N White Artech House, 2004 | 786* | 2004 |
Microfabricated high-finesse optical cavity with open access and small volume M Trupke, EA Hinds, S Eriksson, EA Curtis, Z Moktadir, E Kukharenka, ... Applied Physics Letters 87 (21), 2005 | 198 | 2005 |
A review on coupled MEMS resonators for sensing applications utilizing mode localization C Zhao, MH Montaseri, GS Wood, SH Pu, AA Seshia, M Kraft Sensors and Actuators A: Physical 249, 93-111, 2016 | 196 | 2016 |
A monolithic surface micromachined Z-axis gyroscope with digital output X Jiang, JI Seeger, M Kraft, BE Boser 2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No …, 2000 | 159 | 2000 |
An acceleration sensing method based on the mode localization of weakly coupled resonators H Zhang, B Li, W Yuan, M Kraft, H Chang Journal of Microelectromechanical Systems 25 (2), 286-296, 2016 | 144 | 2016 |
Electroplating moulds using dry film thick negative photoresist E Kukharenka, MM Farooqui, L Grigore, M Kraft, N Hollinshead Journal of Micromechanics and Microengineering 13 (4), S67, 2003 | 105 | 2003 |
A high-performance accelerometer with a fifth-order sigma–delta modulator Y Dong, M Kraft, C Gollasch, W Redman-White Journal of micromechanics and microengineering 15 (7), S22, 2005 | 101 | 2005 |
A force sensor based on three weakly coupled resonators with ultrahigh sensitivity C Zhao, GS Wood, J Xie, H Chang, SH Pu, M Kraft Sensors and Actuators A: Physical 232, 151-162, 2015 | 99 | 2015 |
Electromechanical Sigma-Delta Modulators (ΣΔM) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review F Chen, X Li, M Kraft IEEE Sensors Journal 16 (17), 2016 | 92 | 2016 |
Fabrication and operation of a two-dimensional ion-trap lattice on a high-voltage microchip RC Sterling, H Rattanasonti, S Weidt, K Lake, P Srinivasan, SC Webster, ... Nature communications 5 (1), 3637, 2014 | 89 | 2014 |
Micromachined inertial sensors: The state-of-the-art and a look into the future M Kraft Measurement and Control 33 (6), 164-168, 2000 | 89 | 2000 |
Closed-loop silicon accelerometers M Kraft, CP Lewis, TG Hesketh IEE Proceedings-Circuits, Devices and Systems 145 (5), 325-331, 1998 | 88 | 1998 |
A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity C Zhao, GS Wood, J Xie, H Chang, SH Pu, M Kraft IEEE/ASME Journal of MEMS 25 (1), 38-51, 2015 | 83 | 2015 |
Higher order noise-shaping filters for high-performance micromachined accelerometers Y Dong, M Kraft, W Redman-White Instrumentation and Measurement, IEEE Transactions on 56 (5), 1666-1674, 2007 | 81 | 2007 |
An integrated surface micromachined capacitive lateral accelerometer with 2μG/√ Hz resolution X Jiang, F Wang, M Kraft, BE Boser Proceedings of the Solid-State Sensor, Actuator and Microsystems Workshop, 2002 | 81 | 2002 |
Microfluidic enzymatic biosensing systems: A review S Mross, S Pierrat, T Zimmermann, M Kraft Biosensors and Bioelectronics 70, 376-391, 2015 | 78 | 2015 |
A dicing free SOI process for MEMS devices I Sari, I Zeimpekis, M Kraft Microelectronic Engineering 95, 121-129, 2012 | 70 | 2012 |
Sense finger dynamics in a Σ∆ force-feedback gyroscope JI Seeger, X Jiang, M Kraft, BE Boser University of California, Berkeley 94720, 1999 | 66* | 1999 |
Combining numerous uncorrelated MEMS gyroscopes for accuracy improvement based on an optimal Kalman filter H Chang, L Xue, C Jiang, M Kraft, W Yuan IEEE Transactions on Instrumentation and Measurement 61 (11), 3084-3093, 2012 | 65 | 2012 |
Droplet formation by squeezing in a microfluidic cross-junction S Van Loo, S Stoukatch, M Kraft, T Gilet Microfluidics and Nanofluidics 20, 1-12, 2016 | 62 | 2016 |