A low-voltage actuated micromachined microwave switch using torsion springs and leverage D Hah, S Hong IEEE Transactions on Microwave theory and techniques 48 (12), 2540-2545, 2000 | 196 | 2000 |
Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators D Hah, STY Huang, JC Tsai, H Toshiyoshi, MC Wu Journal of microelectromechanical systems 13 (2), 279-289, 2004 | 190 | 2004 |
A scanning micromirror with angular comb drive actuation PR Patterson, D Hah, H Nguyen, H Toshiyoshi, R Chao, MC Wu Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE …, 2002 | 151 | 2002 |
Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors D Hah, PR Patterson, HD Nguyen, H Toshiyoshi, MC Wu IEEE Journal of Selected Topics in Quantum Electronics 10 (3), 505-513, 2004 | 140 | 2004 |
Pre-shaped buckled-beam actuators: theory and experiments S Park, D Hah Sensors and Actuators A: Physical 148 (1), 186-192, 2008 | 136 | 2008 |
Surface-and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators W Piyawattanametha, PR Patterson, D Hah, H Toshiyoshi, MC Wu Journal of Microelectromechanical Systems 14 (6), 1329-1338, 2005 | 128 | 2005 |
Angular vertical comb-driven tunable capacitor with high-tuning capabilities HD Nguyen, D Hah, PR Patterson, R Chao, W Piyawattanametha, EK Lau, ... Journal of Microelectromechanical systems 13 (3), 406-413, 2004 | 99 | 2004 |
A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror D Hah, CA Choi, CK Kim, CH Jun journal of micromechanics and microengineering 14 (8), 1148, 2004 | 66 | 2004 |
MEMS tunable capacitor based on angular vertical comb drives MC Wu, HD Nguyen, DY Hah, PR Patterson US Patent 7,085,122, 2006 | 61 | 2006 |
Scanning micromirrors: An overview PR Patterson, D Hah, M Fujino, W Piyawattanametha, MC Wu Optomechatronic Micro/Nano Components, Devices, and Systems 5604, 195-207, 2004 | 52 | 2004 |
Open-loop operation of MEMS-based 1/spl times/N wavelength-selective switch with long-term stability and repeatability J Tsai, S Huang, D Hah, H Toshiyoshi, MC Wu IEEE Photonics Technology Letters 16 (4), 1041-1043, 2004 | 52 | 2004 |
1/spl times/N/sup 2/wavelength-selective switch with two cross-scanning one-axis analog micromirror arrays in a 4-f optical system J Tsai, STY Huang, D Hah, MC Wu Journal of lightwave technology 24 (2), 897-903, 2006 | 50 | 2006 |
A 2D scanner by surface and bulk micromachined vertical comb actuators W Piyawattanametha, PR Patterson, D Hah, H Toshiyoshi, MC Wu 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 03EX682 …, 2003 | 48 | 2003 |
Low voltage MEMS analog micromirror arrays with hidden vertical comb-drive actuators D Hah, S Huang, H Nguyen, H Chang, JC Tsai, MC Wu, H Toshiyoshi Proc. Solid-State Sensor, Actuator, and Microsystems Workshop, 11-14, 2002 | 44 | 2002 |
Design of electrostatic actuators for MOEMS applications D Hah, H Toshiyoshi, MC Wu Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 4755, 200-207, 2002 | 43 | 2002 |
MEMS-actuated photonic crystal switches MCM Lee, D Hah, EK Lau, H Toshiyoshi, M Wu IEEE photonics technology letters 18 (2), 358-360, 2006 | 41 | 2006 |
Open-loop operation of MEMS WDM routers with analog micromirror array S Huang, JC Tsai, D Hah, H Toshiyoshi, MC Wu IEEE/LEOS International Conference on Optical MEMs, 179-180, 2002 | 35 | 2002 |
A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers D Hah, S Huang, H Nguyen, H Chang, MC Wu, H Toshiyoshi Optical Fiber Communications (OFC) 2002, 92-93, 2002 | 35 | 2002 |
Scanning micromirror for optical communication systems and method of manufacturing the same DY Hah, HJ Ryu, CA Choi, CH Jun, YT Kim US Patent 6,822,776, 2004 | 34* | 2004 |
Micro-optical switch and method for manufacturing the same HJ Ryu, DY Hah, CH Jun, YT Kim US Patent 6,791,731, 2004 | 29 | 2004 |