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Ville Miikkulainen
Ville Miikkulainen
Aalto University School of Chemical Engineering
在 aalto.fi 的电子邮件经过验证
标题
引用次数
引用次数
年份
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
V Miikkulainen, M Leskelä, M Ritala, RL Puurunen
Journal of Applied Physics 113 (2), 2013
16612013
Atomic layer deposition of spinel lithium manganese oxide by film-body-controlled lithium incorporation for thin-film lithium-ion batteries
V Miikkulainen, A Ruud, E Østreng, O Nilsen, M Laitinen, T Sajavaara, ...
The Journal of Physical Chemistry C 118 (2), 1258-1268, 2014
872014
Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer-coated paperboard
T Hirvikorpi, M Vähä-Nissi, A Harlin, J Marles, V Miikkulainen, ...
Applied Surface Science 257 (3), 736-740, 2010
772010
Atomic layer deposition of molybdenum nitride from bis (tert-butylimido)-bis (dimethylamido) molybdenum and ammonia onto several types of substrate materials with equal growth …
V Miikkulainen, M Suvanto, TA Pakkanen
Chemistry of materials 19 (2), 263-269, 2007
702007
Controlling the crystallinity and roughness of atomic layer deposited titanium dioxide films
RL Puurunen, T Sajavaara, E Santala, V Miikkulainen, T Saukkonen, ...
Journal of nanoscience and nanotechnology 11 (9), 8101-8107, 2011
682011
Atomic layer deposition of functional films for Li‐ion microbatteries
O Nilsen, V Miikkulainen, KB Gandrud, E Østreng, A Ruud, H Fjellvåg
physica status solidi (a) 211 (2), 357-367, 2014
642014
Atomic layer deposition of Li x Ti y O z thin films
V Miikkulainen, O Nilsen, M Laitinen, T Sajavaara, H Fjellvåg
RSC advances 3 (20), 7537-7542, 2013
572013
Studies of the electrochemical behavior of LiNi0. 80Co0. 15Al0. 05O2 electrodes coated with LiAlO2
O Srur-Lavi, V Miikkulainen, B Markovsky, J Grinblat, M Talianker, ...
Journal of The Electrochemical Society 164 (13), A3266, 2017
522017
Bis(tert‐butylimido)‐bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group
V Miikkulainen, M Suvanto, TA Pakkanen
Chemical Vapor Deposition 14 (3‐4), 71-77, 2008
482008
Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check
WA Lanford, M Parenti, BJ Nordell, MM Paquette, AN Caruso, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2016
432016
Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidics
A Kestilä, K Nordling, V Miikkulainen, M Kaipio, T Tikka, M Salmi, A Auer, ...
Additive manufacturing 22, 31-37, 2018
422018
Electrical characterization of amorphous LiAlO 2 thin films deposited by atomic layer deposition
Y Hu, A Ruud, V Miikkulainen, T Norby, O Nilsen, H Fjellvåg
RSC advances 6 (65), 60479-60486, 2016
402016
Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts
V Miikkulainen, M Suvanto, TA Pakkanen, S Siitonen, P Karvinen, ...
Surface and Coatings Technology 202 (21), 5103-5109, 2008
352008
Understanding the stabilizing effects of nanoscale metal oxide and Li–metal oxide coatings on lithium-ion battery positive electrode materials
Z Ahaliabadeh, V Miikkulainen, M Mantymaki, S Mousavihashemi, ...
ACS Applied Materials & Interfaces 13 (36), 42773-42790, 2021
252021
Atomic layer deposited lithium aluminum oxide:(In) dependency of film properties from pulsing sequence
V Miikkulainen, O Nilsen, H Li, SW King, M Laitinen, T Sajavaara, ...
Journal of Vacuum Science & Technology A 33 (1), 2015
242015
Molybdenum nitride nanotubes
V Miikkulainen, M Suvanto, TA Pakkanen
Thin solid films 516 (18), 6041-6047, 2008
222008
Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate
A Ruud, V Miikkulainen, K Mizohata, H Fjellvåg, O Nilsen
Journal of Vacuum Science & Technology A 35 (1), 2017
202017
Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
E Österlund, H Seppänen, K Bespalova, V Miikkulainen, ...
Journal of Vacuum Science & Technology A 39 (3), 2021
192021
Atomic layer deposition as pore diameter adjustment tool for nanoporous aluminum oxide injection molding masks
V Miikkulainen, T Rasilainen, E Puukilainen, M Suvanto, TA Pakkanen
Langmuir 24 (9), 4473-4477, 2008
192008
Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition
HE Nieminen, V Miikkulainen, D Settipani, L Simonelli, P Hönicke, ...
The Journal of Physical Chemistry C 123 (25), 15802-15814, 2019
152019
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