Multi-axis capacitive accelerometer YW Hsu, S Chen, HT Chien US Patent 8,205,498, 2012 | 90 | 2012 |
Capacitive sensor and manufacturing method thereof YW Hsu, CT Huang, JY Lin, S Chen US Patent 8,104,354, 2012 | 58 | 2012 |
New capacitive low-g triaxial accelerometer with low cross-axis sensitivity YW Hsu, JY Chen, HT Chien, S Chen, ST Lin, LP Liao Journal of Micromechanics and Microengineering 20 (5), 055019, 2010 | 47 | 2010 |
Multi-axis capacitive accelerometer YW Hsu, HT Chien, S Chen US Patent 8,459,114, 2013 | 44 | 2013 |
A CMOS-MEMS gyroscope interface circuit design with high gain and low temperature dependence H Sun, K Jia, X Liu, G Yan, YW Hsu, RM Fox, H Xie IEEE Sensors Journal 11 (11), 2740-2748, 2011 | 35 | 2011 |
Microelectromechanical apparatus having a measuring range selector YW Hsu, FC Hsu, CT Huang, ST Lin US Patent 10,203,252, 2019 | 31 | 2019 |
MEMS device with multiple electrodes and fabricating method thereof YW Hsu, CF Kuo, CT Huang, CK Mao, CH Wang US Patent 9,249,008, 2016 | 18 | 2016 |
Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same CT Huang, ST Lin, YW Hsu US Patent 8,809,972, 2014 | 15 | 2014 |
Structure and process for microelectromechanical system-based sensor LT Chen, SC Lin, YW Hsu US Patent 8,643,125, 2014 | 14 | 2014 |
Mirco-electro-mechanical system pressure sensor and manufacturing method thereof YW Hsu, CY Wu, SC Lin, ST Lin US Patent App. 14/329,111, 2015 | 12 | 2015 |
Active thermal compensation of MEMS based gyroscope SR Chiu, CY Sue, CH Lin, LT Teng, LP Liao, YW Hsu, YK Su SENSORS, 2012 IEEE, 1-4, 2012 | 11 | 2012 |
Micro-electromechanical apparatus having central anchor YW Hsu, CY Su, CT Huang US Patent App. 15/252,226, 2017 | 10 | 2017 |
Sensing device and manufacturing method thereof LT Chen, YW Hsu, TC Ho, LC Pan US Patent 8,763,457, 2014 | 10 | 2014 |
Micro-electromechanical system device having electrical insulating structure and manufacturing methods YW Hsu, ST Lin, JY Chen, CT Huang US Patent 8,695,426, 2014 | 10 | 2014 |
Calibration apparatus and method for capacitive sensing devices YW Hsu, LP Liao, CL Hsiao, YC Hsu US Patent 8,242,788, 2012 | 10 | 2012 |
Microelectromechanical system device with electrical interconnections and method for fabricating the same CT Huang, YW Hsu, CF Kuo US Patent 9,051,170, 2015 | 9 | 2015 |
Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same CT Huang, ST Lin, YW Hsu US Patent 9,227,841, 2016 | 8 | 2016 |
Micro-electro-mechanical-system device with oscillating assembly CY Su, CT Huang, SC Lin, YW Hsu US Patent 9,046,367, 2015 | 8 | 2015 |
A fully integrated circuit for MEMS vibrating gyroscope using standard 0.25 um CMOS process SR Chiu, CY Sue, LP Liao, LT Teng, YW Hsu, YK Su 2011 6th International Microsystems, Packaging, Assembly and Circuits …, 2011 | 8 | 2011 |
Composite micro-electro-mechanical-system apparatus and manufacturing method thereof CY Su, CT Huang, TC Lee, YW Hsu US Patent 9,238,576, 2016 | 7 | 2016 |