Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications I Zamora, E Ledesma, A Uranga, N Barniol IEEE Access 8, 142785-142794, 2020 | 39 | 2020 |
Miniaturized 0.13-μm CMOS front-end analog for AlN PMUT arrays I Zamora, E Ledesma, A Uranga, N Barniol Sensors 20 (4), 1205, 2020 | 35 | 2020 |
Tent-plate AlN PMUT with a piston-like shape under liquid operation E Ledesma, I Zamora, A Uranga, N Barniol IEEE Sensors Journal 20 (19), 11128-11137, 2020 | 29 | 2020 |
9.5% scandium doped ALN PMUT compatible with pre-processed CMOS substrates E Ledesma, I Zamora, A Uranga, N Barniol 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 26 | 2021 |
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties E Ledesma, I Zamora, J Yanez, A Uranga, N Barniol Microsystems & Nanoengineering 8 (1), 76, 2022 | 18 | 2022 |
Monolithic PMUT-on-CMOS ultrasound system for single pixel acoustic imaging E Ledesma, I Zamora, A Uranga, N Barniol 2021 IEEE 34th international conference on micro electro mechanical systems …, 2021 | 16 | 2021 |
AlN piezoelectric micromachined ultrasonic transducer array monolithically fabricated on top of pre-processed CMOS substrates E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigo, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 15 | 2019 |
Phased array based on AlScN Piezoelectric Micromachined Ultrasound Transducers monolithically integrated on CMOS I Zamora, E Ledesma, A Uranga, N Barniol IEEE Electron Device Letters 43 (7), 1113-1116, 2022 | 13 | 2022 |
Squared PMUT with enhanced pressure sensitivities E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigó, ... Proceedings 2 (13), 925, 2018 | 13 | 2018 |
Enhancing AlN PMUTs’ acoustic responsivity within a MEMS-on-CMOS process E Ledesma, I Zamora, A Uranga, F Torres, N Barniol Sensors 21 (24), 8447, 2021 | 12 | 2021 |
AlN PMUT with crossed-cavity for better acoustic pressure outputs in liquid at high frequency E Ledesma, V Tzanov, I Zamora, F Torres, A Uranga, N Barniol, E Marigó, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 9 | 2019 |
AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range J Yanez, E Ledesma, A Uranga, N Barniol 2021 IEEE International Ultrasonics Symposium (IUS), 1-4, 2021 | 6 | 2021 |
Multielement ring array based on minute size PMUTs for high acoustic pressure and tunable focus depth E Ledesma, I Zamora, A Uranga, N Barniol Sensors 21 (14), 4786, 2021 | 6 | 2021 |
High accuracy ultrasound micro-distance measurements with PMUTs under liquid operation I Zamora, E Ledesma, A Uranga, N Barniol Sensors 21 (13), 4524, 2021 | 6 | 2021 |
Fully integrated CMOS-PMUT transceiver I Zamora, E Ledesma, A Uranga, N Barniol 2018 25th IEEE International Conference on Electronics, Circuits and Systems …, 2018 | 5 | 2018 |
Liquid operable AlN PMUT with high output pressure capabilities E Ledesma, I Zamora, V Tzanov, F Torres, A Uranga, N Barniol, E Marigó, ... 2019 IEEE International Ultrasonics Symposium (IUS), 251-254, 2019 | 4 | 2019 |
An AlSCN PMUT-on-CMOS sensor for monitoring fluids’ density, viscosity, sound velocity, and compressibility E Ledesma, I Zamora, J Yanez, A Uranga, N Barniol 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 3 | 2023 |
A 0.5 mm2 pitch-matched AlN PMUT-on-CMOS ultrasound imaging system E Ledesma, I Zamora, A Uranga, N Barniol 2022 IEEE International Ultrasonics Symposium (IUS), 1-4, 2022 | 3 | 2022 |
Improved electromechanical transduction for piezoMUMPS HBAR impedance Sensors J Yanez, E Ledesma, A Uranga, N Barniol 2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020 | 3 | 2020 |
Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images E Ledesma, A Uranga, F Torres, N Barniol IEEE Sensors Journal, 2024 | 1 | 2024 |