| Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol Sensors and Actuators A: Physical 197, 88-95, 2013 | 71 | 2013 |
| Integration of NEMS resonators in a 65 nm CMOS technology JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ... Microelectronic Engineering 110, 246-249, 2013 | 36 | 2013 |
| Zero-level packaging of MEMS in standard CMOS technology E Marigó, JL Lopez, G Murillo, F Torres, J Giner, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 20 (6), 064009, 2010 | 19 | 2010 |
| Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators J Giner, A Uranga, F Torres, E Marigo, N Barniol Electronics letters 46 (9), 640, 2010 | 18 | 2010 |
| A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators J Giner, A Uranga, JL Muñóz-Gamarra, E Marigó, N Barniol Journal of Micromechanics and Microengineering 22 (5), 055020, 2012 | 17 | 2012 |
| Monolithical AlN PMUT on pre-processed CMOS substrate J Mufioz, F Torres, A Uranga, V Tsanov, N Bamiol, E Marigó, ... 2018 IEEE International Frequency Control Symposium (IFCS), 1-3, 2018 | 16 | 2018 |
| Design of a MEMS-Based oscillator using 180nm CMOS technology S Roy, H Ramiah, AW Reza, CC Lim, EM Ferrer PloS one 11 (7), e0158954, 2016 | 16 | 2016 |
| VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator JL Lopez, J Verd, A Uranga, G Murillo, J Giner, E Marigó, F Torres, ... Procedia Chemistry 1 (1), 1131-1134, 2009 | 16 | 2009 |
| AlN piezoelectric micromachined ultrasonic transducer array monolithically fabricated on top of pre-processed CMOS substrates E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigo, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 15 | 2019 |
| Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si AF Malik, V Jeoti, M Fawzy, A Iqbal, Z Aslam, MS Pandian, E Marigo 2016 6th International Conference on Intelligent and Advanced Systems (ICIAS …, 2016 | 14 | 2016 |
| Squared PMUT with enhanced pressure sensitivities E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigó, ... Proceedings 2 (13), 925, 2018 | 13 | 2018 |
| Fabrication and measurement of a suspended nanochannel microbridge resonator monolithically integrated with CMOS readout circuitry G Vidal-Álvarez, E Marigó, F Torres, N Barniol Micromachines 7 (3), 40, 2016 | 13 | 2016 |
| Packaged CMOS–MEMS free–free beam oscillator E Marigó, J Verd, JL López, A Uranga, N Barniol Journal of Micromechanics and Microengineering 23 (11), 115018, 2013 | 13 | 2013 |
| Monolithically integrated double-ended tuning fork-based oscillator with low bias voltage in air conditions JL Lopez, J Verd, E Marigó, A Uranga, G Murillo, J Giner, F Torres, ... Procedia Chemistry 1 (1), 614-617, 2009 | 13 | 2009 |
| Thin film piezoelectric devices integrated on CMOS MS Pandian, EM Ferrer, WS Tay, V Madhaven, AK Kantimahanti, ... 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications …, 2016 | 12 | 2016 |
| Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator A Uranga, G Sobreviela, N Barniol, E Marigo, C Tay-Wee-Song, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 12 | 2015 |
| Mid-air haptic feedback enabled by aluminum nitride PMUTs M Billen, EM Ferrer, MS Pandian, X Rottenberg, V Rochus 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 11 | 2022 |
| Multi-frequency imaging with a CMOS compatible scandium doped aluminum nitride pMUT array M Billen, H Gao, D Tabruyn, E Marigó, M Soundara-Pandian, P Helin, ... 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 11 | 2021 |
| High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters JL López, J Verd, J Giner, A Uranga, G Murillo, E Marigo, F Torres, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 11 | 2009 |
| Monolithic BAW oscillator with conventional QFN packaging E Marigó, M Soundara-Pandian, J Bin, J Din, NSB Roslan, A Fawzy, ... 2019 Joint Conference of the IEEE International Frequency Control Symposium …, 2019 | 10 | 2019 |
