Multiring Circular Transmission Line Model for Ultralow Contact Resistivity Extraction H Yu, M Schaekers, T Schram, E Rosseel, K Martens, S Demuynck, ... Electron Device Letters, IEEE 36 (6), 600-602, 2015 | 77 | 2015 |
1.5× 10− 9 Ωcm2 Contact resistivity on highly doped Si: P using Ge pre-amorphization and Ti silicidation H Yu, M Schaekers, E Rosseel, A Peter, JG Lee, WB Song, S Demuynck, ... 2015 IEEE International Electron Devices Meeting (IEDM), 21.7. 1-21.7. 4, 2015 | 69 | 2015 |
A simplified method for (circular) transmission line model simulation and ultralow contact resistivity extraction H Yu, M Schaekers, T Schram, N Collaert, K De Meyer, N Horiguchi, ... IEEE Electron Device Letters 35 (9), 957-959, 2014 | 61 | 2014 |
Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching Ohm-cm2 H Yu, M Schaekers, A Peter, G Pourtois, E Rosseel, JG Lee, WB Song, ... IEEE Transactions on Electron Devices 63 (12), 4632-4641, 2016 | 54 | 2016 |
Thermal Stability Concern of Metal-Insulator-Semiconductor Contact: A Case Study of Ti/TiO2/n-Si Contact H Yu, M Schaekers, T Schram, S Demuynck, N Horiguchi, K Barla, ... IEEE Transactions on Electron Devices 63 (7), 2671-2676, 2016 | 53 | 2016 |
Selective epitaxial growth of high-P Si: P for source/drain formation in advanced Si nFETs E Rosseel, SK Dhayalan, AY Hikavyy, R Loo, HB Profijt, D Kohen, ... ECS Transactions 75 (8), 347, 2016 | 52 | 2016 |
Contact resistivities of metal-insulator-semiconductor contacts and metal-semiconductor contacts H Yu, M Schaekers, K Barla, N Horiguchi, N Collaert, AVY Thean, ... Applied Physics Letters 108 (17), 2016 | 41 | 2016 |
Sub-10−9 Ω·cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation JL Everaert, M Schaekers, H Yu, LL Wang, A Hikavyy, L Date, ... 2017 Symposium on VLSI Technology, T214-T215, 2017 | 38 | 2017 |
Low-resistance titanium contacts and thermally unstable nickel germanide contacts on p-type germanium H Yu, M Schaekers, T Schram, W Aderhold, AJ Mayur, J Mitard, L Witters, ... IEEE Electron Device Letters 37 (4), 482-485, 2016 | 38 | 2016 |
TiSi(Ge) Contacts Formed at Low Temperature Achieving Around cm2 Contact Resistivities to p-SiGe H Yu, M Schaekers, J Zhang, LL Wang, JL Everaert, N Horiguchi, ... IEEE Transactions on Electron Devices 64 (2), 500-506, 2017 | 36 | 2017 |
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-) silicidation H Yu, M Schaekers, A Hikavyy, E Rosseel, A Peter, K Hollar, FA Khaja, ... 2016 IEEE Symposium on VLSI Technology, 1-2, 2016 | 35 | 2016 |
Comprehensive study of Ga activation in Si, SiGe and Ge with 5 × 10−10Ω·cm2contact resistivity achieved on Ga doped Ge using nanosecond laser activation LL Wang, H Yu, M Schaekers, JL Everaert, A Franquet, B Douhard, L Date, ... 2017 IEEE International Electron Devices Meeting (IEDM), 22.4. 1-22.4. 4, 2017 | 30 | 2017 |
Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal SA Chew, H Yu, M Schaekers, S Demuynck, G Mannaert, E Kunnen, ... 2017 IEEE International Interconnect Technology Conference (IITC), 1-3, 2017 | 28 | 2017 |
First demonstration of III-V HBTs on 300 mm Si substrates using nano-ridge engineering A Vais, L Witters, Y Mols, AS Hernandez, A Walke, H Yu, M Baryshnikova, ... 2019 IEEE International Electron Devices Meeting (IEDM), 9.1. 1-9.1. 4, 2019 | 25 | 2019 |
Lanthanum and lanthanum silicide contacts on N-type silicon H Yu, LL Wang, M Schaekers, JL Everaert, YL Jiang, D Mocuta, ... IEEE Electron Device Letters 38 (7), 843-846, 2017 | 25 | 2017 |
Polarization fatigue in ferroelectric vinylidene fluoride and trifluoroethylene copolymer thin films GD Zhu, Y Gu, H Yu, SS Fu, YL Jiang Journal of Applied Physics 110 (2), 2011 | 24 | 2011 |
Study of nickel silicide formation on Si (1 1 0) substrate X Guo, H Yu, YL Jiang, GP Ru, DW Zhang, BZ Li Applied surface science 257 (24), 10571-10575, 2011 | 17 | 2011 |
Study of the intrinsic limitations of the contact resistance of metal/semiconductor interfaces through atomistic simulations A Dabral, G Pourtois, K Sankaran, W Magnus, H Yu, AJ de Meux, AKA Lu, ... ECS Journal of Solid State Science and Technology 7 (6), N73, 2018 | 15 | 2018 |
MIS or MS? Source/drain contact scheme evaluation for 7nm Si CMOS technology and beyond H Yu, M Schaekers, S Demuynck, K Barla, A Mocuta, N Horiguchi, ... 2016 16th International Workshop on Junction Technology (IWJT), 19-24, 2016 | 15 | 2016 |
Heterostructure at CMOS source/drain: Contributor or alleviator to the high access resistance problem? H Yu, M Schaekers, E Rosseel, JL Everaert, P Eyben, T Chiarella, ... 2016 IEEE International Electron Devices Meeting (IEDM), 25.1. 1-25.1. 4, 2016 | 13 | 2016 |