| Structural characterization of polycrystalline thin films by X-ray diffraction techniques A Pandey, S Dalal, S Dutta, A Dixit Journal of Materials Science: Materials in Electronics 32, 1341-1368, 2021 | 96 | 2021 |
| Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110) S Dutta, M Imran, P Kumar, R Pal, P Datta, R Chatterjee Microsystem technologies 17, 1621-1628, 2011 | 72 | 2011 |
| Improved electrical properties of PbZrTiO3/BiFeO3 multilayers with ZnO buffer layer S Dutta, A Pandey, I Yadav, OP Thakur, R Laishram, R Pal, R Chatterjee Journal of Applied Physics 112 (8), 2012 | 43 | 2012 |
| Effect of residual stress on RF MEMS switch S Dutta, M Imran, R Pal, KK Jain, R Chatterjee Microsystem technologies 17, 1739-1745, 2011 | 41 | 2011 |
| Growth and electrical properties of spin coated ultrathin ZrO2 films on silicon S Dutta, A Pandey, I Yadav, OP Thakur, A Kumar, R Pal, R Chatterjee Journal of Applied Physics 114 (1), 2013 | 35 | 2013 |
| Overview of residual stress in MEMS structures: Its origin, measurement, and control S Dutta, A Pandey Journal of Materials Science: Materials in Electronics 32 (6), 6705-6741, 2021 | 32 | 2021 |
| Growth and evolution of residual stress of AlN films on silicon (100) wafer A Pandey, S Dutta, R Prakash, S Dalal, R Raman, AK Kapoor, D Kaur Materials Science in Semiconductor Processing 52, 16-23, 2016 | 31 | 2016 |
| Growth and comparison of residual stress of AlN films on silicon (100),(110) and (111) substrates A Pandey, S Dutta, R Prakash, R Raman, AK Kapoor, D Kaur Journal of Electronic Materials 47, 1405-1413, 2018 | 30 | 2018 |
| Growth assessment and scrutinize dielectric reliability of c-axis oriented insulating AlN thin films in MIM structures for microelectronics applications S Pawar, K Singh, S Sharma, A Pandey, S Dutta, D Kaur Materials Chemistry and Physics 219, 74-81, 2018 | 29 | 2018 |
| Structural and optical properties of bulk MoS2 for 2D layer growth A Pandey, S Dutta, A Kumar, R Raman, A K Kapoor, R Muralidhran Advanced Materials Letters 7 (10), 777-782, 2016 | 28 | 2016 |
| Electrical properties of ultrathin titanium dioxide films on silicon S Dutta, L Leeladhar, A Pandey, OP Thakur, R Pal Journal of Vacuum Science & Technology A 33 (2), 2015 | 25 | 2015 |
| Fabrication challenges for realization of wet etching based comb type capacitive microaccelerometer structure S Dutta, R Pal, P Kumar, OP Hooda, J Singh, DP Shaveta SaxenaG, ... Sens Transducers J 111, 18-24, 2009 | 23 | 2009 |
| Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure N Gupta, S Dutta, A Panchal, I Yadav, S Kumar, Y Parmar, SRK Vanjari, ... Journal of Materials Science: Materials in Electronics 30, 15705-15714, 2019 | 22 | 2019 |
| Diffusion induced residual stress in comb-type microaccelerometer structure S Dutta, Shaveta, M Imran, R Pal, RK Bhan Journal of Materials Science: Materials in Electronics 25, 3828-3832, 2014 | 22 | 2014 |
| Influence of residual stress on performance of AlN thin film based piezoelectric MEMS accelerometer structure N Gupta, A Pandey, SRK Vanjari, S Dutta Microsystem Technologies 25, 3959-3967, 2019 | 20 | 2019 |
| Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates A Pandey, J Kaushik, S Dutta, AK Kapoor, D Kaur Thin Solid Films 666, 143-149, 2018 | 19 | 2018 |
| Microstructure and improved electrical properties of Ti-substituted BiFeO3 thin films GN Sharma, S Dutta, A Pandey, SK Singh, R Chatterjee Materials Research Bulletin 95, 223-228, 2017 | 19 | 2017 |
| Optically triggered multilevel resistive switching characteristics of Cu/MoS2/AlN/ITO bilayer memory structure S Sharma, A Kumar, S Dutta, D Kaur Applied Physics Letters 117 (19), 2020 | 18 | 2020 |
| Evolution of TiOx-SiOx nano-composite during annealing of ultrathin titanium oxide films on Si substrate I Yadav, S Dutta, A Pandey, N Yadav, A Goyal, R Chatterjee Ceramics International 46 (12), 19935-19941, 2020 | 18 | 2020 |
| Effect of vacuum packaging on bandwidth of push–pull type capacitive accelerometer structure S Dutta, P Saxena, A Panchal, R Pal, KK Jain, DK Bhattacharya Microsystem Technologies 24, 4855-4862, 2018 | 18 | 2018 |
Ratnamala ChatterjeeProfessor, Physics Department, I.I.T Delhi在 physics.iitd.ac.in 的电子邮件经过验证
