| A multiscale assembly and packaging system for manufacturing of complex micro-nano devices AN Das, R Murthy, DO Popa, HE Stephanou IEEE Transactions on Automation Science and Engineering 9 (1), 160-170, 2011 | 99 | 2011 |
| Selective epitaxial germanium on silicon-on-insulator high speed photodetectors using low-temperature ultrathin Si0. 8Ge0. 2 buffer TH Loh, HS Nguyen, R Murthy, MB Yu, WY Loh, GQ Lo, ... Applied Physics Letters 91 (7), 2007 | 81 | 2007 |
| Enhanced microfiltration devices configured with hydrodynamic trapping and a rain drop bypass filtering architecture for microbial cells detection C Lay, CY Teo, L Zhu, XL Peh, HM Ji, BR Chew, R Murthy, HH Feng, ... Lab on a Chip 8 (5), 830-833, 2008 | 48 | 2008 |
| -Deterministic, Multiscale, Multirobot Platform for Microsystems Packaging: Design and Quasi-Static Precision Evaluation DO Popa, R Murthy, AN Das IEEE Transactions on Automation Science and Engineering 6 (2), 345-361, 2009 | 43 | 2009 |
| TSV Cu filling failure modes and mechanisms causing the failures JW Choi, OL Guan, M Yingjun, HBM Yusoff, X Jielin, CC Lan, WL Loh, ... IEEE Transactions on Components, Packaging and Manufacturing Technology 4 (4 …, 2014 | 34 | 2014 |
| ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 ½D MEMS assembly R Murthy, A Das, DO Popa 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, 34-40, 2008 | 32 | 2008 |
| Impact of packaging design on reliability of large die Cu/low-κ (BD) interconnect TC Chai, X Zhang, HY Li, VN Sekhar, WY Hnin, ML Thew, OK Navas, ... 2008 58th Electronic Components and Technology Conference, 38-45, 2008 | 30* | 2008 |
| Precise motion control of a piezoelectric microgripper for microspectrometer assembly K Rabenorosoa, C Cle´ vy, P Lutz, AN Das, R Murthy, D Popa International Design Engineering Technical Conferences and Computers and …, 2009 | 29 | 2009 |
| ARRIpede: An assembled die-scale microcrawler R Murthy, AN Das, DO Popa, HE Stephanou Advanced Robotics 25 (8), 965-990, 2011 | 28 | 2011 |
| AFAM: An articulated four axes microrobot for nanoscale applications R Murthy, HE Stephanou, DO Popa IEEE Transactions on Automation Science and Engineering 10 (2), 276-284, 2012 | 27 | 2012 |
| Semiconductor device and production method thereof F Masuoka, S Arai, H Nakamura, T Kudo, RR MURTHY, S Nansheng, ... US Patent 8,466,512, 2013 | 25 | 2013 |
| High‐Yield Automated MEMS Assembly DO Popa, HE Stephanou Robotic Microassembly, 253-278, 2010 | 20 | 2010 |
| Polysilicon interconnections (FEOL): Fabrication and characterization A Agarwal, RB Murthy, V Lee, G Viswanadam 2009 11th Electronics Packaging Technology Conference, 317-320, 2009 | 20 | 2009 |
| M3-modular multi-scale assembly system for MEMS packaging D Popa, R Murthy, M Mittal, J Sin, H Stephanou 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems …, 2006 | 19 | 2006 |
| A four degree of freedom microrobot with large work volume R Murthy, DO Popa 2009 IEEE International Conference on Robotics and Automation, 1028-1033, 2009 | 17 | 2009 |
| ARRIpede: an assembled micro crawler R Murthy, AN Das, DO Popa 2008 8th IEEE Conference on Nanotechnology, 833-836, 2008 | 17 | 2008 |
| Multiscale robotics framework for MEMS assembly R Murthy, A Das, D Popa 2006 9th International Conference on Control, Automation, Robotics and …, 2006 | 12 | 2006 |
| Millimeter-scale microrobots for wafer-level factories R Murthy, DO Popa 2010 IEEE International Conference on Robotics and Automation, 488-493, 2010 | 11 | 2010 |
| Semiconductor device and production method thereof F Masuoka, S Arai, H Nakamura, T Kudo, RR MURTHY, S Nansheng, ... US Patent 8,563,379, 2013 | 10 | 2013 |
| High yield assembly of compliant MEMS snap fasteners R Murthy, AN Das, DO Popa International Design Engineering Technical Conferences and Computers and …, 2008 | 10 | 2008 |
