Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism J Aarik, A Aidla, H Mändar, T Uustare Applied Surface Science 172 (1-2), 148-158, 2001 | 300 | 2001 |
Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition J Aarik, A Aidla, H Mändar, V Sammelselg, T Uustare Journal of Crystal Growth 220 (1-2), 105-113, 2000 | 295 | 2000 |
Optical characterization of HfO2 thin films grown by atomic layer deposition J Aarik, H Mändar, M Kirm, L Pung Thin solid films 466 (1-2), 41-47, 2004 | 244 | 2004 |
Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on α-Al2O3 substrates J Aarik, A Aidla, H Mändar, T Uustare, M Schuisky, A Hårsta Journal of Crystal Growth 242 (1-2), 189-198, 2002 | 206 | 2002 |
Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures J Aarik, A Aidla, H Mändar, T Uustare, K Kukli, M Schuisky Applied surface science 173 (1-2), 15-21, 2001 | 197 | 2001 |
Anomalous effect of temperature on atomic layer deposition of titanium dioxide J Aarik, A Aidla, H Mändar, V Sammelselg Journal of Crystal Growth 220 (4), 531-537, 2000 | 195 | 2000 |
Influence of structure development on atomic layer deposition of TiO2 thin films J Aarik, J Karlis, H Mändar, T Uustare, V Sammelselg Applied surface science 181 (3-4), 339-348, 2001 | 147 | 2001 |
Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process J Aarik, A Aidla, H Mändar, T Uustare, V Sammelselg Thin Solid Films 408 (1-2), 97-103, 2002 | 119 | 2002 |
Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition A Suisalu, J Aarik, H Mändar, I Sildos Thin Solid Films 336 (1-2), 295-298, 1998 | 117 | 1998 |
Electrochemical reduction of oxygen on nanostructured gold electrodes A Sarapuu, M Nurmik, H Mändar, A Rosental, T Laaksonen, K Kontturi, ... Journal of Electroanalytical Chemistry 612 (1), 78-86, 2008 | 101 | 2008 |
Atomic layer deposition of TiO2 from TiCl4 and O3 L Aarik, T Arroval, R Rammula, H Mändar, V Sammelselg, J Aarik Thin Solid Films 542, 100-107, 2013 | 92 | 2013 |
Influence of phase composition on optical properties of TiO2: Dependence of refractive index and band gap on formation of TiO2-II phase in thin films K Möls, L Aarik, H Mändar, A Kasikov, A Niilisk, R Rammula, J Aarik Optical Materials 96, 109335, 2019 | 72 | 2019 |
Influence of single and double deposition temperatures on the interface quality of atomic layer deposited Al2O3 dielectric thin films on silicon S Dueñas, H Castán, H García, A De Castro, L Bailón, K Kukli, A Aidla, ... Journal of applied physics 99 (5), 2006 | 65 | 2006 |
Electrochemical and surface characterisation of gold nanoparticle decorated multi-walled carbon nanotubes N Alexeyeva, J Kozlova, V Sammelselg, P Ritslaid, H Mändar, ... Applied Surface Science 256 (10), 3040-3046, 2010 | 61 | 2010 |
Nature of the native deep localized defect recombination centers in the chalcopyrite and orthorhombic J Krustok, J Raudoja, M Krunks, H Mändar, H Collan Journal of Applied Physics 88 (1), 205-209, 2000 | 60 | 2000 |
Photoluminescence of sol–gel-prepared hafnia V Kiisk, S Lange, K Utt, T Tätte, H Mändar, I Sildos Physica B: Condensed Matter 405 (2), 758-762, 2010 | 59 | 2010 |
Atomic layer deposition of tantalum oxide thin films from iodide precursor K Kukli, J Aarik, A Aidla, K Forsgren, J Sundqvist, A Hårsta, T Uustare, ... Chemistry of materials 13 (1), 122-128, 2000 | 59 | 2000 |
Refractive index gradients in TiO2 thin films grown by atomic layer deposition A Kasikov, J Aarik, H Mändar, M Moppel, M Pärs, T Uustare Journal of Physics D: Applied Physics 39 (1), 54, 2005 | 56 | 2005 |
Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties A Tarre, J Aarik, H Mändar, A Niilisk, R Pärna, R Rammula, T Uustare, ... Applied surface science 254 (16), 5149-5156, 2008 | 53 | 2008 |
Characterization of asymmetric rhombohedral twin in epitaxial α-Cr2O3 thin films by X-ray and electron diffraction H Mändar, T Uustare, J Aarik, A Tarre, A Rosental Thin Solid Films 515 (11), 4570-4579, 2007 | 52 | 2007 |