| Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon D Shah, DI Patel, T Roychowdhury, GB Rayner, N O’Toole, DR Baer, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 73 | 2018 |
| Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition GB Rayner, N O’Toole, J Shallenberger, B Johs Journal of Vacuum Science & Technology A 38 (6), 2020 | 18 | 2020 |
| Ultra high purity conditions for atomic scale processing GB Rayner, NC O'toole, DE Carlsen US Patent 11,631,571, 2023 | 1 | 2023 |
| Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride GB Rayner, N O’Toole, B Liu, J Shallenberger, J Zhu, T Palacios, ... Journal of Vacuum Science & Technology A 43 (2), 2025 | | 2025 |
| Ultra High Purity Conditions for Atomic Scale Processing GB Rayner, NC O'toole, DE Carlsen US Patent App. 18/178,664, 2023 | | 2023 |
| Pressure-Induced Temperature Modification During Atomic Scale Processing GB Rayner, NC O'toole, TJ Larrabee US Patent App. 17/679,448, 2022 | | 2022 |
| Plasma Enhanced Atomic Layer Deposition of High Purity Titanium Nitride: Comparison of Hollow Cathode and Inductively Coupled Discharges S Woodward, O Zabieda, L Martinu, B Rayner, N O’Toole, KSA Butcher Proceedings of the 2018 Technical Conference Proceedings Emerging …, 2018 | | 2018 |
