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Jang Soo Ouk
Jang Soo Ouk
Korea Institute of Fusion Energy
在 kfe.re.kr 的电子邮件经过验证
标题
引用次数
引用次数
年份
Hydrogen generation from the dissociation of water using microwave plasmas
YH Jung, SO Jang, HJ You
Chinese Physics Letters 30 (6), 065204, 2013
172013
Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation
HJ You, DW Kim, M Koo, SO Jang, YH Jung, SH Hong, BJ Lee
Review of Scientific Instruments 82 (1), 2011
82011
Development of silicon carbide atomic layer etching technology
KI Lee, DC Seok, SO Jang, YS Choi
Thin Solid Films 707, 138084, 2020
72020
Design and fabrication of a superconducting magnet for an 18 GHz electron cyclotron resonance ion/photon source NFRI-ECRIPS
HJ You, SW Jang, YH Jung, TH Lho, SJ Lee
Review of Scientific Instruments 83 (2), 2012
72012
Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources
SOJYSC Seung Pyo Hong, Kang-Il Lee, Hyun Jong You
Nanomaterials 12 (1959), 2022
52022
Characteristics of plasma flow for microwave plasma assisted aerosol deposition
IJ Kang, CH Cho, H Chang, SO Jang, HJ Park, DG Kim, KM Lee, JH Kim
Nanomaterials 11 (7), 1705, 2021
42021
A method for generating plasma activated water and its biological assessments
SR Yoo, JS Park, SM Ryu, EJ Hong, T Lho, SO Jang, GH Song
2012 Abstracts IEEE International Conference on Plasma Science, 1P-151-1P-151, 2012
42012
Microwave antenna for generating plasma
HJ You, SO Jang, YH Jung, BJ Lee
US Patent 8,648,534, 2014
32014
Development status of the 18 GHz superconducting electron cyclotron resonance ion source at National Fusion Research Institute
HJ You, SO Jang, WI Choo, YH Jung, TH Lho, SJ Yoo
Review of Scientific Instruments 85 (2), 2014
32014
Measurement of Mach probe on plasma flow velocity in highly collisional plasma jet
IJ Kang, H Chang, YS Choi, SO Jang, CH Cho, JH Kim, HJ Park
Current Applied Physics 39, 45-50, 2022
22022
Ion Beam Figuring with Focused Anode Layer Thruster
SOJ Oleksii I. Girka, Kang-Il Lee, Yong Sup Choi
Review of scientific Instrument 93 (6), 2022
22022
Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna
SO Jang, HJ You, YW Kim, YH Jung, IU Hwang, JY Park, H Lee
Plasma Chemistry and Plasma Processing 34, 229-237, 2014
22014
Effect of CH4 addition to the H2 Plasma Excited by HF ICP for H2 Production
DW Kim, YH Jung, WI Choo, SO Jang, BJ Lee, YH Kim, SH Lee, SK Kwon
Journal of the Korean Institute of Electrical and Electronic Material …, 2009
22009
Point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module
DC Seok, TH Lho, YH Jung, YS Choi, KI Lee, SR Yoo, SO Jang
US Patent 11,776,819, 2023
12023
51‐3: Copper Thin Film Dry Etching Equipment via ECR Plasma Source
JN Jang, JH Lee, JH Jung, K Jung, S Lee, D Kim, MP Hong, SG Kim, ...
SID Symposium Digest of Technical Papers 54 (1), 734-737, 2023
12023
55‐3: Development of Low‐Temperature Metal Dry‐Etching Equipment via ECR Plasma Source
C Kim, JH Jung, JN Jang, JH Lee, K Jung, HW Yoon, S Lee, D Kim, ...
SID Symposium Digest of Technical Papers 53 (1), 729-732, 2022
12022
Beam Profile Measurements with a Slit-Faraday Cup and a Wire Scanner for a Newly Developed 18 GHz Superconducting ECR Ion Source and Its Lebt
HJ You, SO Jang, WI Choo
4th International Beam Instrumentation Conference (IBIC2015), Melbourne …, 2015
12015
64‐4: ECR Plasma Source for Copper Thin Film Dry Etching
JN Jang, JH Lee, S Lee, K Jung, D Kim, MP Hong, SG Kim, SO Jang, ...
SID Symposium Digest of Technical Papers 55 (1), 878-880, 2024
2024
Large-Scale Carbon Nanowall Synthesis Using Upgraded ReSLAN Plasma Source
H Park, SO Jang, JH Shin, K il Lee, YS Choi
IEEE Transactions on Plasma Science, 2024
2024
Microwave Plasma Assisted Aerosol Deposition (μ-PAD) for Ceramic Coating Applications
SO Jang, C Cho, JH Kim, IJ Kang, H Chang, H Park, K Lee, DG Kim, ...
Ceramics 5 (4), 1174-1184, 2022
2022
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