Hydrogen generation from the dissociation of water using microwave plasmas YH Jung, SO Jang, HJ You Chinese Physics Letters 30 (6), 065204, 2013 | 17 | 2013 |
Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation HJ You, DW Kim, M Koo, SO Jang, YH Jung, SH Hong, BJ Lee Review of Scientific Instruments 82 (1), 2011 | 8 | 2011 |
Development of silicon carbide atomic layer etching technology KI Lee, DC Seok, SO Jang, YS Choi Thin Solid Films 707, 138084, 2020 | 7 | 2020 |
Design and fabrication of a superconducting magnet for an 18 GHz electron cyclotron resonance ion/photon source NFRI-ECRIPS HJ You, SW Jang, YH Jung, TH Lho, SJ Lee Review of Scientific Instruments 83 (2), 2012 | 7 | 2012 |
Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources SOJYSC Seung Pyo Hong, Kang-Il Lee, Hyun Jong You Nanomaterials 12 (1959), 2022 | 5 | 2022 |
Characteristics of plasma flow for microwave plasma assisted aerosol deposition IJ Kang, CH Cho, H Chang, SO Jang, HJ Park, DG Kim, KM Lee, JH Kim Nanomaterials 11 (7), 1705, 2021 | 4 | 2021 |
A method for generating plasma activated water and its biological assessments SR Yoo, JS Park, SM Ryu, EJ Hong, T Lho, SO Jang, GH Song 2012 Abstracts IEEE International Conference on Plasma Science, 1P-151-1P-151, 2012 | 4 | 2012 |
Microwave antenna for generating plasma HJ You, SO Jang, YH Jung, BJ Lee US Patent 8,648,534, 2014 | 3 | 2014 |
Development status of the 18 GHz superconducting electron cyclotron resonance ion source at National Fusion Research Institute HJ You, SO Jang, WI Choo, YH Jung, TH Lho, SJ Yoo Review of Scientific Instruments 85 (2), 2014 | 3 | 2014 |
Measurement of Mach probe on plasma flow velocity in highly collisional plasma jet IJ Kang, H Chang, YS Choi, SO Jang, CH Cho, JH Kim, HJ Park Current Applied Physics 39, 45-50, 2022 | 2 | 2022 |
Ion Beam Figuring with Focused Anode Layer Thruster SOJ Oleksii I. Girka, Kang-Il Lee, Yong Sup Choi Review of scientific Instrument 93 (6), 2022 | 2 | 2022 |
Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna SO Jang, HJ You, YW Kim, YH Jung, IU Hwang, JY Park, H Lee Plasma Chemistry and Plasma Processing 34, 229-237, 2014 | 2 | 2014 |
Effect of CH4 addition to the H2 Plasma Excited by HF ICP for H2 Production DW Kim, YH Jung, WI Choo, SO Jang, BJ Lee, YH Kim, SH Lee, SK Kwon Journal of the Korean Institute of Electrical and Electronic Material …, 2009 | 2 | 2009 |
Point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module DC Seok, TH Lho, YH Jung, YS Choi, KI Lee, SR Yoo, SO Jang US Patent 11,776,819, 2023 | 1 | 2023 |
51‐3: Copper Thin Film Dry Etching Equipment via ECR Plasma Source JN Jang, JH Lee, JH Jung, K Jung, S Lee, D Kim, MP Hong, SG Kim, ... SID Symposium Digest of Technical Papers 54 (1), 734-737, 2023 | 1 | 2023 |
55‐3: Development of Low‐Temperature Metal Dry‐Etching Equipment via ECR Plasma Source C Kim, JH Jung, JN Jang, JH Lee, K Jung, HW Yoon, S Lee, D Kim, ... SID Symposium Digest of Technical Papers 53 (1), 729-732, 2022 | 1 | 2022 |
Beam Profile Measurements with a Slit-Faraday Cup and a Wire Scanner for a Newly Developed 18 GHz Superconducting ECR Ion Source and Its Lebt HJ You, SO Jang, WI Choo 4th International Beam Instrumentation Conference (IBIC2015), Melbourne …, 2015 | 1 | 2015 |
64‐4: ECR Plasma Source for Copper Thin Film Dry Etching JN Jang, JH Lee, S Lee, K Jung, D Kim, MP Hong, SG Kim, SO Jang, ... SID Symposium Digest of Technical Papers 55 (1), 878-880, 2024 | | 2024 |
Large-Scale Carbon Nanowall Synthesis Using Upgraded ReSLAN Plasma Source H Park, SO Jang, JH Shin, K il Lee, YS Choi IEEE Transactions on Plasma Science, 2024 | | 2024 |
Microwave Plasma Assisted Aerosol Deposition (μ-PAD) for Ceramic Coating Applications SO Jang, C Cho, JH Kim, IJ Kang, H Chang, H Park, K Lee, DG Kim, ... Ceramics 5 (4), 1174-1184, 2022 | | 2022 |