| Piezoelectric micromachined ultrasonic transducers based on PZT thin films P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005 | 368 | 2005 |
| Optical inspection of Microsystems W Osten, A Duparre, C Furlong, I De Wolf, A Asundi, K Korner, D Vogel, ... CRC press, 2018 | 242 | 2018 |
| Design and simulation of an electrostatic micropump for drug-delivery applications T Bourouina, A Bosseboeuf, JP Grandchamp Journal of Micromechanics and Microengineering 7 (3), 186, 1997 | 226 | 1997 |
| 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope S Petitgrand, R Yahiaoui, K Danaie, A Bosseboeuf, JP Gilles Optics and lasers in engineering 36 (2), 77-101, 2001 | 192 | 2001 |
| Control of direct band gap emission of bulk germanium by mechanical tensile strain M El Kurdi, H Bertin, E Martincic, M De Kersauson, G Fishman, S Sauvage, ... Applied Physics Letters 96 (4), 2010 | 177 | 2010 |
| Characterization of the static and dynamic behaviour of M (O) EMS by optical techniques: status and trends A Bosseboeuf, S Petitgrand Journal of micromechanics and microengineering 13 (4), S23, 2003 | 170 | 2003 |
| Application of microscopic interferometry techniques in the MEMS field A Bosseboeuf, S Petitgrand Microsystems Engineering: Metrology and Inspection III 5145, 1-16, 2003 | 120 | 2003 |
| Permalloy electroplating through photoresist molds JM Quemper, S Nicolas, JP Gilles, JP Grandchamp, A Bosseboeuf, ... Sensors and Actuators A: Physical 74 (1-3), 1-4, 1999 | 105 | 1999 |
| Highly decoupled single-crystal silicon resonators: An approach for the intrinsic quality factor B Le Foulgoc, T Bourouina, O Le Traon, A Bosseboeuf, F Marty, ... Journal of micromechanics and microengineering 16 (6), S45, 2006 | 77 | 2006 |
| Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization S Petitgrand, R Yahiaoui, A Bosseboeuf, K Danaie Microsystems Engineering: Metrology and Inspection 4400, 51-60, 2001 | 73 | 2001 |
| Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub) nanometer resolution S Petitgrand, A Bosseboeuf Journal of Micromechanics and Microengineering 14 (9), S97, 2004 | 57 | 2004 |
| Gold metallizations for eutectic bonding of silicon wafers S Lani, A Bosseboeuf, B Belier, C Clerc, C Gousset, J Aubert Microsystem technologies 12, 1021-1025, 2006 | 49 | 2006 |
| Study of PZT coated membrane structures for micromachined ultrasonic transducers [medical imaging] P Muralt, D Schmitt, N Ledermann, J Baborowski, PK Weber, W Steichen, ... 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium …, 2001 | 49 | 2001 |
| Effect of the residual stress on the determination through nanoindentation technique of the Young's modulus of W thin film deposit on SiO2/Si substrate M Qasmi, P Delobelle, F Richard, A Bosseboeuf Surface and coatings technology 200 (14-15), 4185-4194, 2006 | 43 | 2006 |
| Mesures 3D de topographies et de vibrations a l'echelle (sub) micrometrique par microscopie optique interferometrique S Petitgrand, A Bosseboeuf, JP Gilles, P Coste, P Nérin, P Vabre Proc. Club CMOI, Methodes et Techniques Optiques pour l'Industrie, 2002 | 43 | 2002 |
| Versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices A Bosseboeuf, JP Gilles, K Danaie, R Yahiaoui, M Dupeux, JP Puissant, ... Microsystems Metrology and Inspection 3825, 123-133, 1999 | 35 | 1999 |
| Characterization of residual stress in metallic films on silicon with micromechanical devices M Boutry, A Bosseboeuf, G Coffignal Micromachining and Microfabrication Process Technology II 2879, 126-134, 1996 | 34 | 1996 |
| Towards high fidelity high efficiency MEMS microspeakers I Shahosseini, E Lefeuvre, M Woytasik, J Moulin, X Leroux, S Edmond, ... SENSORS, 2010 IEEE, 2426-2430, 2010 | 33 | 2010 |
| Fabrication of a gray-tone mask and pattern transfer in thick photoresists S Nicolas, E Dufour-Gergam, A Bosseboeuf, T Bourouina, JP Gilles, ... Journal of Micromechanics and Microengineering 8 (2), 95, 1998 | 33 | 1998 |
| Effects of direct and pulse current on copper electrodeposition through photoresist molds JM Quemper, E Dufour-Gergam, N Frantz-Rodriguez, JP Gilles, ... Journal of Micromechanics and Microengineering 10 (2), 116, 2000 | 32 | 2000 |
