Anchor losses in AlN contour mode resonators J Segovia-Fernandez, M Cremonesi, C Cassella, A Frangi, G Piazza Journal of microelectromechanical systems 24 (2), 265-275, 2014 | 143 | 2014 |
Laterally vibrating bulk acoustic wave resonator JS Fernandez, P Smeys, TT Yen US Patent 11,646,714, 2023 | 60 | 2023 |
Analytical and numerical methods to model anchor losses in 65-MHz AlN contour mode resonators J Segovia-Fernandez, G Piazza Journal of Microelectromechanical Systems 25 (3), 459-468, 2016 | 46 | 2016 |
Thermal nonlinearities in contour mode AlN resonators J Segovia-Fernandez, G Piazza Journal of microelectromechanical systems 22 (4), 976-985, 2013 | 45 | 2013 |
Thermoelastic Damping in the Electrodes Determines of AlN Contour Mode Resonators J Segovia-Fernandez, G Piazza Journal of Microelectromechanical Systems 26 (3), 550-558, 2017 | 44 | 2017 |
Optimized resonators for piezoelectric power conversion WD Braun, EA Stolt, L Gu, J Segovia-Fernandez, S Chakraborty, R Lu, ... IEEE Open Journal of Power Electronics 2, 212-224, 2021 | 42 | 2021 |
Monolithic piezoelectric aluminum nitride MEMS-CMOS microphone J Segovia-Fernandez, S Sonmezoglu, ST Block, Y Kusano, JM Tsai, ... 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 39 | 2017 |
Reduction of anchor losses by etched slots in aluminum nitride contour mode resonators C Cassella, J Segovia-Fernandez, G Piazza, M Cremonesi, A Frangi 2013 Joint European Frequency and Time Forum & International Frequency …, 2013 | 38 | 2013 |
Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators J Segovia-Fernandez, M Cremonesi, C Cassella, A Frangi, G Piazza 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 35 | 2013 |
Impact of metal electrodes on the figure of merit (kt2·Q) and spurious modes of contour mode AlN resonators J Segovia-Fernandez, NK Kuo, G Piazza Ultrasonics Symposium (IUS), 2012 IEEE International, 299-302, 2012 | 26 | 2012 |
Integrated high-frequency reference clock systems utilizing mirror-encapsulated BAW resonators ETT Yen, K Martin, M Chowdhury, J Segovia-Fernandez, D Griffith, ... 2019 IEEE International Ultrasonics Symposium (IUS), 2174-2177, 2019 | 24 | 2019 |
Temperature-stable piezoelectric MEMS resonators using integrated ovens and simple resistive feedback circuits C Xu, J Segovia-Fernandez, HJ Kim, G Piazza Journal of Microelectromechanical Systems 26 (1), 187-195, 2016 | 23 | 2016 |
A− 173 dBc/Hz@ 1 MHz offset Colpitts oscillator using AlN contour-mode MEMS resonator J Koo, A Tazzoli, J Segovai-Fernandez, G Piazza, B Otis Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, 1-4, 2013 | 23 | 2013 |
High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated AlN contour-mode MEMS resonator M Rinaldi, A Tazzoli, J Segovia-Fernandez, V Felmetsger, G Piazza 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 20 | 2012 |
High Exceeding 6.4% Through Metal Frames in Aluminum Nitride 2-D Mode Resonators C Cassella, J Segovia-Fernandez IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019 | 19 | 2019 |
Damping in 1 GHz laterally-vibrating composite piezoelectric resonators J Segovia-Fernandez, G Piazza 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 19 | 2015 |
Segmented electrode excitation of aluminum nitride contour mode resonators to optimize the device figure of merit C Cassella, J Segovia-Fernandez, G Piazza 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 17 | 2013 |
Sub-milliwatt integrated oven for temperature stable laterally vibrating piezoelectric MEMS resonators C Xu, J Segovia-Fernandez, G Piazza 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 16 | 2015 |
The impact of electrode materials on 1/f noise in piezoelectric AlN contour mode resonators HJ Kim, SI Jung, J Segovia-Fernandez, G Piazza AIP Advances 8 (5), 2018 | 15 | 2018 |
Frequency selective MEMS microphone based on a bioinspired spiral-shaped acoustic resonator Y Kusano, J Segovia-Fernandez, S Sonmezoglu, R Amirtharajah, ... 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 15 | 2017 |