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Miakonkikh
Miakonkikh
Valiev IPT RAS
在 ftian.ru 的电子邮件经过验证
标题
引用次数
引用次数
年份
Tight-binding terahertz plasmons in chemical-vapor-deposited graphene
A Bylinkin, E Titova, V Mikheev, E Zhukova, S Zhukov, M Belyanchikov, ...
Physical Review Applied 11 (5), 054017, 2019
312019
Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas
A Rezvanov, AV Miakonkikh, AS Vishnevskiy, KV Rudenko, MR Baklanov
Journal of Vacuum Science & Technology B 35 (2), 2017
302017
Anisotropy of hydrogen plasma effects in bulk n-type β-Ga2O3
AY Polyakov, IH Lee, A Miakonkikh, AV Chernykh, NB Smirnov, ...
Journal of Applied Physics 127 (17), 2020
292020
Модели рейтингов финансовой устойчивости
АМ Карминский, АУ Мяконьких, АА Пересецкий
Управление финансовыми рисками, 2-18, 2008
262008
Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers
VP Popov, VA Antonov, MA Ilnitsky, IE Tyschenko, VI Vdovin, ...
Solid-State Electronics 159, 63-70, 2019
192019
Local sensor based on nanowire field effect transistor from inhomogeneously doped silicon on insulator
DE Presnov, IV Bozhev, AV Miakonkikh, SG Simakin, AS Trifonov, ...
Journal of Applied Physics 123 (5), 2018
192018
Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
VP Popov, MA Ilnitskii, ED Zhanaev, AV Myakon’Kich, KV Rudenko, ...
Semiconductors 50, 632-638, 2016
192016
Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics
AA Rezvanov, AV Miakonkikh, DS Seregin, AS Vishnevskiy, KA Vorotilov, ...
Journal of Vacuum Science & Technology A 38 (3), 2020
182020
Size effects in LiNbO3 thin films fabricated by pulsed laser deposition
Z Vakulov, M Ivonin, EG Zamburg, VS Klimin, DP Volik, DA Golosov, ...
Journal of Physics: Conference Series 1124 (2), 022032, 2018
182018
Micro-Raman spectroscopy for monitoring of deposition quality of high-k stack protective layer onto nanowire FET chips for highly sensitive miRNA detection
KA Malsagova, TO Pleshakova, AF Kozlov, ID Shumov, MA Ilnitskii, ...
Biosensors 8 (3), 72, 2018
182018
Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring
KV Rudenko, AV Myakon’kikh, AA Orlikovsky
Russian Microelectronics 36, 179-192, 2007
182007
Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
YM Chesnokov, AV Miakonkikh, AE Rogozhin, KV Rudenko, AL Vasiliev
Journal of materials science 53, 7214-7223, 2018
172018
New method for the Langmuir probe diagnostics of polymerizing plasmas
KV Rudenko, AV Myakon’kikh, AA Orlikovsky, AN Pustovit
Russian Microelectronics 36, 14-26, 2007
172007
Influence of target-substrate distance during pulsed laser deposition on properties of LiNbO3 thin films
Z Vakulov, E Zamburg, DA Golosov, SM Zavadskiy, AP Dostanko, ...
Journal of Physics: Conference Series 917 (3), 032024, 2017
152017
Technology for fabrication of sub-20 nm silicon planar nanowires array
AV Miakonkikh, AA Tatarintsev, AE Rogozhin, KV Rudenko
International Conference on Micro-and Nano-Electronics 2016 10224, 470-474, 2016
152016
In-source and in-trap formation of molecular ions in the actinide mass range at CERN-ISOLDE
M Au, M Athanasakis-Kaklamanakis, L Nies, J Ballof, R Berger, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2023
13*2023
Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation
Z Vakulov, E Zamburg, D Khakhulin, A Geldash, DA Golosov, ...
Nanomaterials 10 (7), 1371, 2020
132020
Dependence of the resistance of the negative e-beam resist hsq versus the dose in the RIE and wet etching processes
AV Miakonkikh, NA Orlikovskiy, AE Rogozhin, AA Tatarintsev, ...
Russian Microelectronics 47, 157-164, 2018
122018
Planar betavoltaic converter creation with plasma-immersion ion implantation process
KV Rudenko, AV Miakonkih, AE Rogojin, SV Bogdanov, VG Sidorov, ...
IOP Conference Series: Materials Science and Engineering 122 (1), 012029, 2016
122016
Hafnia and alumina stacks as UTBOXs in silicon-on insulator
VP Popov, VA Antonov, AK Gutakovskiy, IE Tyschenko, VI Vdovin, ...
Solid-State Electronics 168, 107734, 2020
112020
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