Integration of GMR sensors with different technologies MD Cubells-Beltrán, C Reig, J Madrenas, A De Marcellis, J Santos, ... Sensors 16 (6), 939, 2016 | 103 | 2016 |
Fabrication of a MEMS micromirror based on bulk silicon micromachining combined with grayscale lithography IS Garcia, C Ferreira, JD Santos, M Martins, RA Dias, DE Aguiam, ... Journal of Microelectromechanical Systems 29 (5), 734-740, 2020 | 20 | 2020 |
Monolithic integration of GMR sensors for standard CMOS-IC current sensing A De Marcellis, C Reig, MD Cubells-Beltrán, J Madrenas, JD Santos, ... Solid-State Electronics 135, 100-104, 2017 | 19 | 2017 |
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography DE Aguiam, JD Santos, C Silva, F Gentile, C Ferreira, IS Garcia, J Cunha, ... Micro and Nano Engineering 14, 100111, 2022 | 7 | 2022 |