| Nonlinear limits for single-crystal silicon microresonators V Kaajakari, T Mattila, A Oja, H Seppa Journal of Microelectromechanical systems 13 (5), 715-724, 2004 | 494 | 2004 |
| Practical mems V Kaajakari (No Title), 2009 | 425 | 2009 |
| Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications V Kaajakari, T Mattila, A Oja, J Kiihamaki, H Seppa IEEE Electron Device Letters 25 (4), 173-175, 2004 | 255 | 2004 |
| Nonlinear mechanical effects in silicon longitudinal mode beam resonators V Kaajakari, T Mattila, A Lipsanen, A Oja Sensors and Actuators A: Physical 120 (1), 64-70, 2005 | 136 | 2005 |
| Phase noise in capacitively coupled micromechanical oscillators V Kaajakari, JK Koskinen, T Mattila IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005 | 126 | 2005 |
| Square-extensional mode single-crystal silicon micromechanical RF-resonator V Kaajakari, T Mattila, A Oja, J Kiihamaki, H Kattelus, M Koskenvuori, ... TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 98 | 2003 |
| Stability of wafer level vacuum encapsulated single-crystal silicon resonators V Kaajakari, J Kiihamäki, A Oja, S Pietikäinen, V Kokkala, H Kuisma Sensors and Actuators A: Physical 130, 42-47, 2006 | 93 | 2006 |
| Ultrasonic actuation for MEMS dormancy-related stiction reduction V Kaajakari, SH Kan, LJ Lin, A Lal, MS Rodgers MEMS Reliability for Critical Applications 4180, 60-65, 2000 | 54 | 2000 |
| Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity V Kaajakari, A Lal Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 46 | 2001 |
| Multi-mode frequency synthesizer with temperature compensation T Mattila, O Jaakkola, V Kaajakari, A Oja, H Seppä US Patent 7,145,402, 2006 | 43 | 2006 |
| Thermokinetic actuation for batch assembly of microscale hinged structures V Kaajakari, A Lal Journal of microelectromechanical systems 12 (4), 425-432, 2003 | 43 | 2003 |
| Nonlinearities in single-crystal silicon micromechanical resonators V Kaajakari, T Mattila, J Kiihamaki, H Kattelus, A Oja, H Seppa TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 39 | 2003 |
| Ultrasonically driven surface micromachined motor V Kaajakari, S Rodgers, A Lal Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000 | 37 | 2000 |
| Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator M Koskenvuori, V Kaajakari, T Mattila, I Tittonen 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 35 | 2008 |
| Microstructured polymer for shoe power generation D Han, V Kaajakari TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 32 | 2009 |
| Intermodulation in capacitively coupled microelectromechanical filters AT Alastalo, V Kaajakari IEEE electron device letters 26 (5), 289-291, 2005 | 32 | 2005 |
| Small gear publishing V Kaajakari, M Practical Las Vegas, Nevada, 2009 | 30 | 2009 |
| Acoustic wave device, high frequency front end circuit, communication apparatus, and manufacturing method for acoustic wave device T Kimura, V Kaajakari US Patent 10,771,039, 2020 | 29 | 2020 |
| Analysis of vibration modes in a micromechanical square-plate resonator O Holmgren, K Kokkonen, T Veijola, T Mattila, V Kaajakari, A Oja, ... Journal of Micromechanics and Microengineering 19 (1), 015028, 2008 | 29 | 2008 |
| Electrostatic transducers for micromechanical resonators: Free space and solid dielectric V Kaajakari, AT Alastalo, T Mattila ieee transactions on ultrasonics, ferroelectrics, and frequency control 53 …, 2006 | 29 | 2006 |
