| Vertical memory devices and methods of manufacturing the same H Kim, JH Min, P Jong-Kyoung, S Chung US Patent 9,865,540, 2018 | 465 | 2018 |
| Semiconductor chips and methods of manufacturing the same H Kim, S Chung, JH Min US Patent 9,978,756, 2018 | 39 | 2018 |
| Semiconductor memory devices G Zhang, H Kim, YH Kwon, S PARK US Patent 9,831,260, 2017 | 33 | 2017 |
| Semiconductor devices having gate stack portions that extend in a zigzag pattern H Kim, SW Park, KS Shin US Patent 9,349,747, 2016 | 15 | 2016 |
| Characteristics of reactive ion etching lag in HBr/O2 plasma etching of silicon trench for nanoscale device W Park, WH Lee, WS Kim, H Kim, KW Whang Japanese Journal of Applied Physics 53 (3), 036502, 2014 | 13 | 2014 |
| Analysis of microdischarge characteristics induced by synchronized auxiliary address pulse based on cross-sectional infrared observation in AC plasma display panel HS Tae, HJ Seo, DC Jeong, JH Seo, H Kim, KW Whang IEEE transactions on plasma science 33 (2), 931-940, 2005 | 13 | 2005 |
| Semiconductor Device SW Park, H Kim, KS Shin, G Zhang US Patent 10,192,881, 2019 | 8 | 2019 |
| Effect of bias application to plasma density in weakly magnetized inductively coupled plasma H Kim, W Lee, W Park, KW Whang Journal of Vacuum Science & Technology A 31 (4), 2013 | 7 | 2013 |
| Shrouds and substrate treating systems including the same E Sung, H Kim, D Jang, SI Cho US Patent 10,950,419, 2021 | 6 | 2021 |
| Vertical memory device SIC Hyuk Kim, Dae Hyun Jang, Seung Pil CHUNG US Patent 10,319,864, 0 | 5* | |
| Semiconductor memory devices G Zhang, H Kim, YH Kwon, S PARK US Patent 10,224,339, 2017 | 4 | 2017 |
| Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma HW Cheong, W Lee, JW Kim, KW Whang, H Kim, W Park Journal of Vacuum Science & Technology A 33 (4), 2015 | 4 | 2015 |
| Plasma treatment apparatus and method of fabricating semiconductor device using the same S Bo SHIM, H Kim, ST Lim, J Myung CHOE, J Il LEE, S Cho US Patent 10,790,168, 2020 | 3 | 2020 |
| Showerhead and substrate processing apparatus E Sung, JY Bang, H Kim, SI Cho US Patent 11,035,040, 2021 | 2 | 2021 |
| Investigation of a plasma sheath in a weakly magnetized ICP using laser-induced fluorescence technique H Kim, JH Song, KW Whang IEEE Transactions on Plasma Science 41 (3), 559-563, 2013 | 2 | 2013 |
| 반도체 칩 및 그 제조 방법 SPC Hyuk Kim, JH Min KR Patent 102,618,562, 2023 | | 2023 |
| 반도체 메모리 소자 K Zhang, H Kim KR Patent 102,589,594, 2023 | | 2023 |
| Ion beam etching device HN Cho, JK Kim, H Kim, JC Park KR Patent 102,578,766, 2023 | | 2023 |
| zero horizontal flow showerhead SIC Edward Sung, JY Bang, H Kim KR Patent 102,577,264, 2023 | | 2023 |
| Charge neutralization method using Multi-pulse SIC SB Shim, H Kim, ST Im, JM Choi, JI Lee KR Patent 102,550,393, 2023 | | 2023 |
