Modelling the dynamics of a MEMS resonator: simulations and experiments RMC Mestrom, RHB Fey, JTM Van Beek, KL Phan, H Nijmeijer Sensors and Actuators A: Physical 142 (1), 306-315, 2008 | 233 | 2008 |
Piezoresistive heat engine and refrigerator PG Steeneken, K Le Phan, MJ Goossens, GEJ Koops, G Brom, ... Nature Physics 7 (4), 354-359, 2011 | 180 | 2011 |
Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator RMC Mestrom, RHB Fey, KL Phan, H Nijmeijer Sensors and Actuators A: Physical 162 (2), 225-234, 2010 | 85 | 2010 |
Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator JTM Van Beek, G Verheijden, GEJ Koops, KL Phan, C Van der Avoort, ... 2007 IEEE International Electron Devices Meeting, 411-414, 2007 | 66 | 2007 |
Amplitude saturation of MEMS resonators explained by autoparametric resonance C Van der Avoort, R Van der Hout, JJM Bontemps, PG Steeneken, ... Journal of Micromechanics and Microengineering 20 (10), 105012, 2010 | 64 | 2010 |
Tunnel magnetoresistive current sensors for IC testing K Le Phan, H Boeve, F Vanhelmont, T Ikkink, F De Jong, H De Wilde Sensors and Actuators A: Physical 129 (1-2), 69-74, 2006 | 35 | 2006 |
A piezo-resistive resonant MEMS amplifier JTM Van Beek, KL Phan, G Verheijden, GEJ Koops, C Van der Avoort, ... 2008 IEEE International Electron Devices Meeting, 1-4, 2008 | 33 | 2008 |
A novel elastomer-based magnetoresistive accelerometer KL Phan, A Mauritz, FGA Homburg Sensors and Actuators A: Physical 145, 109-115, 2008 | 33 | 2008 |
56 MHZ piezoresistive micromechanical oscillator JJM Bontemps, A Murroni, JTM Van Beek, J van Den Homberg, JJ Koning, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 23 | 2009 |
Wafer level encapsulation technology for MEMS devices using an HF-permeable PECVD SIOC capping layer G Verheijden, GEJ Koops, KL Phan, JTM Van Beek 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 23 | 2008 |
Geometry optimization of TMR current sensors for on-chip IC testing K Le Phan, H Boeve, F Vanhelmont, T Ikkink, W Talen IEEE transactions on magnetics 41 (10), 3685-3687, 2005 | 22 | 2005 |
Failure analysis of a thin-film nitride MEMS package Q Li, JFL Goosen, JTM Van Beek, F van Keulen, KL Phan, GQ Zhang Microelectronics Reliability 48 (8-9), 1557-1561, 2008 | 21 | 2008 |
Narrow bandwidth single-resonator MEMS tuning fork filter J Yan, AA Seshia, KL Phan, PG Steeneken, JTM van Beek 2007 IEEE International Frequency Control Symposium Joint with the 21st …, 2007 | 18 | 2007 |
Internal electrical and mechanical phase inversion for coupled resonator-array MEMS filters J Yan, AA Seshia, KL Phan, JTM van Beek Sensors and Actuators A: Physical 158 (1), 18-29, 2010 | 17 | 2010 |
Experimental validation of hardening and softening resonances in a clamped-clamped beam MEMS resonator RMC Mestrom, RHB Fey, KL Phan, H Nijmeijer Procedia Chemistry 1 (1), 812-815, 2009 | 16 | 2009 |
Methods to correct for creep in elastomer-based sensors K Le Phan SENSORS, 2008 IEEE, 1119-1122, 2008 | 15 | 2008 |
The influence of tantalum content in relation to substrate temperature on magnetic and structural properties of Co–Cr–Ta thin films P Le Kim, C Lodder, NH Luong, TD Hien Journal of magnetism and magnetic materials 193 (1-3), 117-120, 1999 | 15 | 1999 |
Piezoresistive ring-shaped MEMS resonator KL Phan, JTM van Beek, GEJ Koops TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 14 | 2009 |
Spontaneous mechanical oscillation of a DC driven single crystal KL Phan, PG Steeneken, MJ Goossens, GEJ Koops, GJAM Verheijden, ... arXiv preprint arXiv:0904.3748, 2009 | 13 | 2009 |
Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters J Yan, AA Seshia, KL Phan, JTM van Beek 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 11 | 2008 |