Monolithically integrated thermoelectric energy harvester based on silicon nanowire arrays for powering micro/nanodevices D Dávila, A Tarancon, C Calaza, M Salleras, M Fernández-Regúlez, ... Nano energy 1 (6), 812-819, 2012 | 136 | 2012 |
SiGe nanowire arrays based thermoelectric microgenerator ID Noyan, G Gadea, M Salleras, M Pacios, C Calaza, A Stranz, M Dolcet, ... Nano Energy 57, 492-499, 2019 | 90 | 2019 |
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques RMR Pinto, V Gund, C Calaza, KK Nagaraja, KB Vinayakumar Microelectronic Engineering 257, 111753, 2022 | 56 | 2022 |
Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor G Gadea, A Morata, JD Santos, D Dávila, C Calaza, M Salleras, ... Nanotechnology 26 (19), 195302, 2015 | 49 | 2015 |
Silicon nanowire arrays as thermoelectric material for a power microgenerator D Dávila, A Tarancón, M Fernández-Regúlez, C Calaza, M Salleras, ... Journal of Micromechanics and Microengineering 21 (10), 104007, 2011 | 47 | 2011 |
An uncooled infrared focal plane array for low-cost applications fabricated with standard CMOS technology C Calaza, N Viarani, G Pedretti, M Gottardi, A Simoni, V Zanini, M Zen Sensors and Actuators A: Physical 132 (1), 129-138, 2006 | 45 | 2006 |
Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators L Fonseca, JD Santos, A Roncaglia, D Narducci, C Calaza, M Salleras, ... Semiconductor Science and Technology 31 (8), 084001, 2016 | 39 | 2016 |
All-silicon thermoelectric micro/nanogenerator including a heat exchanger for harvesting applications ID Noyan, M Dolcet, M Salleras, A Stranz, C Calaza, G Gadea, M Pacios, ... Journal of Power Sources 413, 125-133, 2019 | 37 | 2019 |
Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates J Samà, MS Seifner, G Domènech-Gil, J Santander, C Calaza, M Moreno, ... Sensors and Actuators B: Chemical 243, 669-677, 2017 | 33 | 2017 |
Electrical transport properties of V2O5 thin films obtained by thermal annealing of layers grown by RF magnetron sputtering at room temperature HMR Giannetta, C Calaza, DG Lamas, L Fonseca, L Fraigi Thin Solid Films 589, 730-734, 2015 | 32 | 2015 |
Planar thermoelectric microgenerators based on silicon nanowires D Dávila, A Tarancón, D Kendig, M Fernández-Regúlez, N Sabaté, ... Journal of electronic materials 40, 851-855, 2011 | 32 | 2011 |
A surface micromachining process for the development of a medium-infrared tuneable Fabry–Perot interferometer C Calaza, L Fonseca, M Moreno, S Marco, C Cané, I Gracia Sensors and Actuators A: Physical 113 (1), 39-47, 2004 | 32 | 2004 |
Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements C Calaza, B Margesin, F Giacomozzi, K Rangra, V Mulloni Microelectronic engineering 84 (5-8), 1358-1362, 2007 | 30 | 2007 |
Finite-element analysis of a miniaturized ion mobility spectrometer for security applications R Cumeras, I Gràcia, E Figueras, L Fonseca, J Santander, M Salleras, ... Sensors and Actuators B: Chemical 170, 13-20, 2012 | 28 | 2012 |
A micromachined thermoelectric sensor for natural gas analysis: Multivariate calibration results S Udina, M Carmona, A Pardo, C Calaza, J Santander, L Fonseca, ... Sensors and Actuators B: Chemical 166, 338-348, 2012 | 28 | 2012 |
Qualitative and quantitative substance discrimination using a CMOS compatible non-specific NDIR microarray L Fonseca, R Rubio, J Santander, C Calaza, N Sabaté, P Ivanov, ... Sensors and Actuators B: Chemical 141 (2), 396-403, 2009 | 27 | 2009 |
Improved thermal behavior of multiple linked arrays of silicon nanowires integrated into planar thermoelectric microgenerators D Dávila, A Tarancón, C Calaza, M Salleras, M Fernández-Regúlez, ... Journal of electronic materials 42, 1918-1925, 2013 | 24 | 2013 |
A wide tuning range MEMS varactor based on a toggle push-pull mechanism P Farinelli, F Solazzi, C Calaza, B Margesin, R Sorrentino 2008 European Microwave Integrated Circuit Conference, 474-477, 2008 | 23 | 2008 |
New approach for batch microfabrication of silicon-based micro fuel cells N Sabaté, JP Esquivel, J Santander, JG Hauer, RW Verjulio, I Gràcia, ... Microsystem technologies 20, 341-348, 2014 | 22 | 2014 |
Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modeling and data processing C Calaza, E Meca, S Marco, M Moreno, J Samitier, L Fonseca, I Gracia, ... IEEE sensors journal 3 (5), 587-594, 2003 | 22 | 2003 |