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Jean Herve Tortai
Jean Herve Tortai
Permanent researcher, CNRS, Laboratoire des technologies de la microélectronique
在 ltmlab.fr 的电子邮件经过验证
标题
引用次数
引用次数
年份
Self-healing of capacitors with metallized film technology:: experimental observations and theoretical model
JH Tortai, A Denat, N Bonifaci
Journal of Electrostatics 53 (2), 159-169, 2001
1242001
Diagnostic of the self-healing of metallized polypropylene film by modeling of the broadening emission lines of aluminum emitted by plasma discharge
JH Tortai, N Bonifaci, A Denat, C Trassy
Journal of Applied Physics 97 (5), 2005
1082005
Core double–shell cobalt/graphene/polystyrene magnetic nanocomposites synthesized by in situ sonochemical polymerization
V Hermán, H Takacs, F Duclairoir, O Renault, JH Tortai, B Viala
RSC Advances 5 (63), 51371-51381, 2015
892015
Influence of pattern density in nanoimprint lithography
C Gourgon, C Perret, G Micouin, F Lazzarino, JH Tortai, O Joubert, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
862003
CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns
G Gay, T Baron, C Agraffeil, B Salhi, T Chevolleau, G Cunge, H Grampeix, ...
Nanotechnology 21 (43), 435301, 2010
422010
Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes
J Thiault, J Foucher, JH Tortai, O Joubert, S Landis, S Pauliac
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2005
412005
Self-healing of metallized polymer films of different nature
B Walgenwitz, JH Tortai, N Bonifaci, A Denat
Proceedings of the 2004 IEEE International Conference on Solid Dielectrics …, 2004
382004
Epoxy silsesquioxane resists for UV nanoimprint lithography
J De Girolamo, M Chouiki, JH Tortai, C Sourd, S Derrough, M Zelsmann, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
252008
Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists
A Jouve, J Simon, J Foucher, T David, JH Tortai, H Solak
Advances in Resist Technology and Processing XXII 5753, 720-731, 2005
242005
Overcoming pattern collapse on e-beam and EUV lithography
A Jouve, J Simon, A Pikon, H Solak, C Vannuffel, JH Tortai
Advances in Resist Technology and Processing XXIII 6153, 456-466, 2006
222006
Insulating properties of some liquids after an electrical arc
JH Tortai, N Bonifaci, A Denat
IEEE transactions on dielectrics and electrical insulation 9 (1), 3-9, 2002
192002
Influence of residual solvent in polymers patterned by nanoimprint lithography
C Gourgon, JH Tortai, F Lazzarino, C Perret, G Micouin, O Joubert, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
182004
Thickness-dependent glass transition temperature of thin resist films for high resolution lithography
S Marceau, JH Tortai, J Tillier, N Vourdas, E Gogolides, I Raptis, ...
Microelectronic engineering 83 (4-9), 1073-1077, 2006
162006
Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films
N Vourdas, G Karadimos, D Goustouridis, E Gogolides, AG Boudouvis, ...
Journal of applied polymer science 102 (5), 4764-4774, 2006
152006
An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods
A Akbalık, S Soulan, JH Tortai, D Fuard, I Kone, J Hazart, P Schiavone
Metrology, Inspection, and Process Control for Microlithography XXIII 7272 …, 2009
142009
Modeling of ultra thin resist film structure after spin-coating and post-application bake
JH Tortai
Microelectronic engineering 73, 223-227, 2004
132004
Near-Zero Negative Real Permittivity in Far Ultraviolet: Extending Plasmonics and Photonics with B1-MoNx
S Kassavetis, BD Ozsdolay, N Kalfagiannis, A Habib, JH Tortai, ...
The Journal of Physical Chemistry C 123 (34), 21120-21129, 2019
102019
Sensitivity analysis for accurate determination of PSF parameters
T Figueiro, JH Tortai, P Schiavone
Microelectronic Engineering 97, 77-80, 2012
102012
Geometry impact on ultrahigh resolution pattern collapse
A Jouve, J Simon, L Gonon, JH Tortai
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
102007
Influence of PEN thermal properties on flexible film patterned by nanoimprint lithography
C Gourgon, G Philippot, S Labau, JH Tortai, M Benwadih, J Bablet
Microelectronic engineering 88 (8), 1959-1963, 2011
92011
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