Simultaneous Measurements of the Fabricated Width and Thickness of Silicon Nitride Waveguides with Microring Resonators MJ Azizpour, DT Phan, A Tareki, B Le Drogoff, M Chaker, M Ménard 2021 IEEE 17th International Conference on Group IV Photonics (GFP), 1-2, 2021 | | 2021 |