| Impact of plasma induced damage on the fabrication of 3D NAND flash memory T Reiter, X Klemenschits, L Filipovic Solid-State Electronics 192, 108261, 2022 | 12 | 2022 |
| Triggered superradiance and spin inversion storage in a hybrid quantum system W Kersten, N De Zordo, O Diekmann, T Reiter, M Zens, AN Kanagin, ... Physical Review Letters 131 (4), 043601, 2023 | 5 | 2023 |
| Effect of mask geometry variation on plasma etching profiles J Bobinac, T Reiter, J Piso, X Klemenschits, O Baumgartner, Z Stanojevic, ... Micromachines 14 (3), 665, 2023 | 5 | 2023 |
| Tractor beams with optimal pulling force using structured waves M Horodynski, T Reiter, M Kühmayer, S Rotter Physical Review A 108 (2), 023504, 2023 | 4 | 2023 |
| Modeling incomplete conformality during atomic layer deposition in high aspect ratio structures LF Aguinsky, F Rodrigues, T Reiter, X Klemenschits, L Filipovic, ... Solid-State Electronics 201, 108584, 2023 | 3 | 2023 |
| Impact of high-aspect-ratio etching damage on selective epitaxial silicon growth in 3D NAND flash memory T Reiter, X Klemenschits, L Filipovic 2021 Joint International EUROSOI Workshop and International Conference on …, 2021 | 3 | 2021 |
| Impact of mask tapering on SF6/O2 plasma etching J Bobinac, T Reiter, J Piso, X Klemenschits, O Baumgartner, Z Stanojevic, ... Microelectronic Devices and Technologies: Proceedings of the 4rd …, 2022 | 2 | 2022 |
| DTCO flow for air spacer generation and its impact on power and performance at N7 L Filipovic, O Baumgartner, X Klemenschits, J Piso, J Bobinac, T Reiter, ... Solid-State Electronics 199, 108527, 2023 | 1 | 2023 |
| Modeling the impact of incomplete conformality during atomic layer processing T Reiter, LF Aguinsky, F Rodrigues, J Weinbub, A Hössinger, L Filipovic Solid-State Electronics 211, 108816, 2024 | | 2024 |
| Physics-Informed Compact Model for SF6/O2 Plasma Etching L Filipovic, J Bobinac, J Piso, T Reiter 2023 International Conference on Simulation of Semiconductor Processes and …, 2023 | | 2023 |
| Modeling Oxide Regrowth During Selective Etching in Vertical 3D NAND Structures T Reiter, A Toifl, A Hössinger, L Filipovic 2023 International Conference on Simulation of Semiconductor Processes and …, 2023 | | 2023 |
| Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs T Reiter, L Filipovic Microelectronic Devices and Technologies, 67, 2023 | | 2023 |
| Process Simulation in Micro-and Nano-Electronics L Filipovic, T Reiter, X Klemenschits, S Leroch, R Stella, O Baumgartner, ... Power 30, 40, 2023 | | 2023 |
| Modeling Plasma-Induced Damage During the Dry Etching of Silicon T Reiter, X Klemenschits, L Filipovic 2022 IEEE International Integrated Reliability Workshop (IIRW), 1-5, 2022 | | 2022 |
| Stabilization of spin ensembles in hybrid quantum systems T Reiter Wien, 2022 | | 2022 |
