Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics Y Lu, H Tang, S Fung, Q Wang, JM Tsai, M Daneman, BE Boser, ... Applied Physics Letters 106 (26), 2015 | 244 | 2015 |
Modeling, fabrication, and characterization of piezoelectric micromachined ultrasonic transducer arrays based on cavity SOI wafers Y Lu, DA Horsley Journal of Microelectromechanical Systems 24 (4), 1142-1149, 2015 | 181 | 2015 |
Design, fabrication, and characterization of scandium aluminum nitride-based piezoelectric micromachined ultrasonic transducers Q Wang, Y Lu, S Mishin, Y Oshmyansky, DA Horsley Journal of microelectromechanical systems 26 (5), 1132-1139, 2017 | 157 | 2017 |
Ultrasonic fingerprint sensor with transmit beamforming based on a PMUT array bonded to CMOS circuitry X Jiang, HY Tang, Y Lu, EJ Ng, JM Tsai, BE Boser, DA Horsley IEEE transactions on ultrasonics, ferroelectrics, and frequency control 64 …, 2017 | 146 | 2017 |
3-D ultrasonic fingerprint sensor-on-a-chip HY Tang, Y Lu, X Jiang, EJ Ng, JM Tsai, DA Horsley, BE Boser IEEE Journal of Solid-State Circuits 51 (11), 2522-2533, 2016 | 146 | 2016 |
Monolithic ultrasound fingerprint sensor X Jiang, Y Lu, HY Tang, JM Tsai, EJ Ng, MJ Daneman, BE Boser, ... Microsystems & nanoengineering 3 (1), 1-8, 2017 | 143 | 2017 |
Integrated piezoelectric micromechanical ultrasonic transducer pixel and array HV Panchawagh, S Ganti, KD Djordjev, DW Burns, TA Dickinson, ... US Patent 10,497,748, 2019 | 128 | 2019 |
A high fill-factor annular array of high frequency piezoelectric micromachined ultrasonic transducers Y Lu, A Heidari, DA Horsley Journal of Microelectromechanical Systems 24 (4), 904-913, 2014 | 117 | 2014 |
Three-port piezoelectric ultrasonic transducer HV Panchawagh, HY Tang, Y Lu, KD Djordjev, S Ganti, DW Burns, ... US Patent 10,001,552, 2018 | 115 | 2018 |
Pulse-echo ultrasound imaging using an AlN piezoelectric micromachined ultrasonic transducer array with transmit beam-forming Y Lu, HY Tang, S Fung, BE Boser, DA Horsley Journal of Microelectromechanical Systems 25 (1), 179-187, 2015 | 114 | 2015 |
Ultrasonic fingerprint sensor for under-display applications HV Panchawagh, IR Badge, Y Lu, KD Djordjev, S Ganti, CJ Tseng, ... US Patent App. 16/006,640, 2018 | 85 | 2018 |
MUT fingerprint ID system Y Lu, D Horsley, HY Tang, B Boser US Patent 10,430,631, 2019 | 81 | 2019 |
Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley journal of microelectromechanical systems 27 (2), 296-304, 2018 | 63 | 2018 |
Pulse-echo ultrasonic fingerprint sensor on a chip H Tang, Y Lu, S Fung, JM Tsai, M Daneman, DA Horsley, BE Boser 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 59 | 2015 |
High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging Y Lu, A Heidari, S Shelton, A Guedes, DA Horsley 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 53 | 2014 |
11.8 integrated ultrasonic system for measuring body-fat composition HY Tang, Y Lu, S Fung, DA Horsley, BE Boser 2015 IEEE International Solid-State Circuits Conference-(ISSCC) Digest of …, 2015 | 52 | 2015 |
Short-range and high-resolution ultrasound imaging using an 8 MHz aluminum nitride PMUT array Y Lu, HY Tang, S Fung, BE Boser, DA Horsley 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 50 | 2015 |
Piezoelectric micromachined ultrasonic transducers for human-machine interfaces and biometric sensing DA Horsley, O Rozen, Y Lu, S Shelton, A Guedes, R Przybyla, HY Tang, ... 2015 IEEE SENSORS, 1-4, 2015 | 47 | 2015 |
Versatile CMOS-MEMS integrated piezoelectric platform JM Tsai, M Daneman, B Boser, D Horsley, M Rais-Zadeh, HY Tang, Y Lu, ... 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 47 | 2015 |
Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes Y Lu, O Rozen, HY Tang, GL Smith, S Fung, BE Boser, RG Polcawich, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 47 | 2015 |