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MMJW van Herpen
MMJW van Herpen
Acacia Impact Innovation BV
在 acacia-ii.com 的电子邮件经过验证
标题
引用次数
引用次数
年份
Multi-spot investigation apparatus
DJW Klunder, M Van Herpen, M Balistreri, C Liedenbaum, M Prins, ...
US Patent App. 11/720,842, 2009
1212009
Wiregrid waveguide
DJW Klunder, MMJW Van Herpen, MA Verschuuren
US Patent App. 12/519,834, 2010
852010
Continuous-wave operation of a single-frequency optical parametric oscillator at 4–5 μm based on periodically poled LiNbO3
M Van Herpen, SE Bisson, FJM Harren
Optics Letters 28 (24), 2497-2499, 2003
742003
Tuning and stability of a continuous-wave mid-infrared high-power single resonant optical parametric oscillator
M Van Herpen, S Li, SE Bisson, S te Lintel Hekkert, FJM Harren
Applied Physics B 75, 329-333, 2002
712002
Wide single-mode tuning of a 3.0–3.8-µm, 700-mW, continuous-wave Nd: YAG-pumped optical parametric oscillator based on periodically poled lithium niobate
M Van Herpen, S te Lintel Hekkert, SE Bisson, FJM Harren
Optics letters 27 (8), 640-642, 2002
702002
Photoacoustic trace gas detection of ethane using a continuously tunable, continuous-wave optical parametric oscillator based on periodically poled lithium niobate
M Van Herpen, S Li, SE Bisson, FJM Harren
Applied Physics Letters 81 (7), 1157-1159, 2002
652002
Optical parametric oscillator-based photoacoustic detection of CO2 at 4.23 μm allows real-time monitoring of the respiration of small insects
M Van Herpen, AKY Ngai, SE Bisson, JHP Hackstein, EJ Woltering, ...
Applied Physics B 82, 665-669, 2006
622006
Sn etching with hydrogen radicals to clean EUV optics
M Van Herpen, DJW Klunder, WA Soer, R Moors, V Banine
Chemical Physics Letters 484 (4-6), 197-199, 2010
572010
Radical cleaning arrangement for a lithographic apparatus
VY Banine, VV Ivanov, JHJ Moors, BT Wolschrijn, DJW Klunder, ...
US Patent 7,462,850, 2008
552008
Combined wide pump tuning and high power of a continuous-wave, singly resonant optical parametric oscillator
M Van Herpen, SE Bisson, AKY Ngai, FJM Harren
Applied Physics B 78, 281-286, 2004
472004
Grid spectral purity filters for suppression of infrared radiation in laser-produced plasma EUV sources
WA Soer, MJJ Jak, AM Yakunin, MMJW van Herpen, VY Banine
Alternative Lithographic Technologies 7271, 774-782, 2009
382009
Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
DJW Klunder, MMJW Van Herpen
US Patent 7,453,645, 2008
382008
Non-invasive glucose sensor
MM Van Herpen, O Such, G Von Basum
US Patent App. 12/297,235, 2009
342009
Extreme ultraviolet multilayer mirror with near-zero IR reflectance
WA Soer, P Gawlitza, M Van Herpen, MJJ Jak, S Braun, P Muys, ...
Optics letters 34 (23), 3680-3682, 2009
332009
Light guide, illumination system, backlighting system and display device
F Pijlman, MMJW Van Herpen, M Van Baardwijk
US Patent App. 13/392,889, 2012
322012
Glucose Sensor
MMJW Van Herpen, MLM Balistreri, C Presura
US Patent App. 11/914,976, 2008
312008
Lithographic apparatus, illumination system and debris trapping system
LP Bakker, DJW Klunder, MMJW Van Herpen
US Patent 7,145,132, 2006
312006
Debris mitigation and cleaning strategies for Sn-based sources for EUV lithography
DJW Klunder, M van Herpen, VY Banine, K Gielissen
Emerging Lithographic Technologies IX 5751, 943-951, 2005
292005
Spectral-purity-enhancing layer for multilayer mirrors
M Van Herpen, RWE van de Kruijs, DJW Klunder, E Louis, AE Yakshin, ...
Optics letters 33 (6), 560-562, 2008
252008
Development of a powerful continuously tunable mid-infrared cw PPLN OPO for trace gas detection
M van Herpen, S te Lintel Hekkert, SE Bisson, FJM Harren
ALT'01 International Conference on Advanced Laser Technologies 4762, 16-21, 2002
252002
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