What is the Young's Modulus of Silicon? MA Hopcroft, WD Nix, TW Kenny Journal of microelectromechanical systems 19 (2), 229-238, 2010 | 2379 | 2010 |
Temperature dependence of quality factor in MEMS resonators B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ... Journal of Microelectromechanical systems 17 (3), 755-766, 2008 | 330 | 2008 |
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ... Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006 | 250 | 2006 |
Temperature-insensitive composite micromechanical resonators R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ... Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009 | 202 | 2009 |
Temperature-compensated aluminum nitride Lamb wave resonators CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2010 | 198 | 2010 |
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators B Kim, RN Candler, MA Hopcroft, M Agarwal, WT Park, TW Kenny Sensors and Actuators A: Physical 136 (1), 125-131, 2007 | 186 | 2007 |
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 175 | 2006 |
Micromechanical testing of SU‐8 cantilevers M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, D Moore, J Brugger Fatigue & Fracture of Engineering Materials & Structures 28 (8), 735-742, 2005 | 167 | 2005 |
Micromechanical Testing of SU-8 Cantilevers M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, DF Moore, J Brugger Abstracts of ATEM: International Conference on Advanced Technology in …, 2003 | 167 | 2003 |
Temperature-compensated high-stability silicon resonators R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ... Applied physics letters 90 (24), 2007 | 150 | 2007 |
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano Applied Physics Letters 97 (8), 2010 | 142 | 2010 |
Thermal isolation of encapsulated MEMS resonators CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ... Journal of Microelectromechanical Systems 17 (1), 175-184, 2008 | 100 | 2008 |
AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices CM Lin, WC Lien, VV Felmetsger, MA Hopcroft, DG Senesky, AP Pisano Applied Physics Letters 97 (14), 2010 | 94 | 2010 |
Using the temperature dependence of resonator quality factor as a thermometer MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ... Applied physics letters 91 (1), 2007 | 92 | 2007 |
Effects of stress on the temperature coefficient of frequency in double clamped resonators R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ... The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 91 | 2005 |
Optimal drive condition for nonlinearity reduction in electrostatic microresonators M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ... Applied physics letters 89 (21), 2006 | 88 | 2006 |
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 74 | 2007 |
Frequency stability of wafer-scale encapsulated MEMS resonators B Kim, RN Candler, M Hopcroft, M Agarwal, WT Park, TW Kenny The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 70 | 2005 |
A study of electrostatic force nonlinearities in resonant microstructures M Agarwal, SA Chandorkar, H Mehta, RN Candler, B Kim, MA Hopcroft, ... Applied Physics Letters 92 (10), 2008 | 62 | 2008 |
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ... Journal of Applied Physics 102 (7), 2007 | 62 | 2007 |